Ionization by drift and ambipolar electric fields in electronegative capacitive radio frequency plasmas

Unlike α- and γ-mode operation, electrons accelerated by strong drift and ambipolar electric fields in the plasma bulk and at the sheath edges are found to dominate the ionization in strongly electronegative discharges. These fields are caused by a low bulk conductivity and local maxima of the elect...

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Bibliographic Details
Published in:Physical review letters 2011-12, Vol.107 (27), p.275001-275001, Article 275001
Main Authors: Schulze, J, Derzsi, A, Dittmann, K, Hemke, T, Meichsner, J, Donkó, Z
Format: Article
Language:English
Subjects:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
CARBON TETRAFLUORIDE
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
ELECTRIC FIELDS
ELECTRIC POTENTIAL
ELECTROMAGNETIC RADIATION
ELECTRON DENSITY
ELECTRONS
ELEMENTARY PARTICLES
EMISSION SPECTROSCOPY
FERMIONS
FLUORINATED ALIPHATIC HYDROCARBONS
HALOGENATED ALIPHATIC HYDROCARBONS
IONIZATION
LEPTONS
ORGANIC COMPOUNDS
ORGANIC FLUORINE COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
PLASMA
RADIATIONS
RADIOWAVE RADIATION
SPECTROSCOPY
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Summary:Unlike α- and γ-mode operation, electrons accelerated by strong drift and ambipolar electric fields in the plasma bulk and at the sheath edges are found to dominate the ionization in strongly electronegative discharges. These fields are caused by a low bulk conductivity and local maxima of the electron density at the sheath edges, respectively. This drift-ambipolar mode is investigated by kinetic particle simulations, experimental phase-resolved optical emission spectroscopy, and an analytical model in CF(4). Mode transitions induced by voltage and pressure variations are studied.
ISSN:0031-9007
1079-7114
DOI:10.1103/physrevlett.107.275001