Fabrication technology of heterojunctions in the lattice of a 2D photonic crystal based on macroporous silicon

Design and fabrication technology of a microcavity structure based on a double heterojunction in macroporous silicon is suggested. The fabrication process of a strip of a 2D photonic crystal constituted by a finite number of lattice periods and the technique for defect formation by local opening of...

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Bibliographic Details
Published in:Semiconductors (Woodbury, N.Y.) N.Y.), 2011-08, Vol.45 (8), p.1103-1110
Main Authors: Zharova, Yu. A., Fedulova, G. V., Astrova, E. V., Baldycheva, A. V., Tolmachev, V. A., Perova, T. S.
Format: Article
Language:English
Subjects:
DEFECTS
FABRICATION
HETEROJUNCTIONS
LIQUID CRYSTALS
Magnetic Materials
Magnetism
MATERIALS SCIENCE
Physics
Physics and Astronomy
SILICON
SUBSTRATES
Testing of Materials and Structures
Treatment
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Summary:Design and fabrication technology of a microcavity structure based on a double heterojunction in macroporous silicon is suggested. The fabrication process of a strip of a 2D photonic crystal constituted by a finite number of lattice periods and the technique for defect formation by local opening of macropores on the substrate side, followed by filling of these macropores with a nematic liquid crystal, are considered.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782611080239