Nonsputtering impulse magnetron discharge

Experiments with quasi-steady high-current discharges in crossed E × B fields in various gases (Ar, N 2 , H 2 , and SF 6 ) and gas mixtures (Ar/SF 6 and Ar/O 2 ) at pressures from 10 −3 to 5 Torr in discharge systems with different configurations of electric and magnetic fields revealed a specific t...

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Bibliographic Details
Published in:Plasma physics reports 2012-01, Vol.38 (1), p.71-78
Main Authors: Khodachenko, G. V., Mozgrin, D. V., Fetisov, I. K., Stepanova, T. V.
Format: Article
Language:English
Subjects:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
Atomic
ELECTRIC CURRENTS
ELECTRIC DISCHARGES
ELECTRIC FIELDS
ELECTRIC POTENTIAL
ELECTRON TEMPERATURE
HYDROGEN
ION TEMPERATURE
IONS
Low-Temperature Plasma
MAGNETIC FIELDS
MAGNETRONS
MIXTURES
Molecular
NITROGEN
Optical and Plasma Physics
Physics
Physics and Astronomy
PLASMA
PLASMA DENSITY
PULSES
SULFUR FLUORIDES
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Summary:Experiments with quasi-steady high-current discharges in crossed E × B fields in various gases (Ar, N 2 , H 2 , and SF 6 ) and gas mixtures (Ar/SF 6 and Ar/O 2 ) at pressures from 10 −3 to 5 Torr in discharge systems with different configurations of electric and magnetic fields revealed a specific type of stable low-voltage discharge that does not transform into an arc. This type of discharge came to be known as a high-current diffuse discharge and, later, a nonsputtering impulse magnetron discharge. This paper presents results from experimental studies of the plasma parameters (the electron temperature, the plasma density, and the temperature of ions and atoms of the plasma-forming gas) of a high-current low-pressure diffuse discharge in crossed E × B fields.
ISSN:1063-780X
1562-6938
DOI:10.1134/S1063780X1112004X