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Nonsputtering impulse magnetron discharge
Experiments with quasi-steady high-current discharges in crossed E × B fields in various gases (Ar, N 2 , H 2 , and SF 6 ) and gas mixtures (Ar/SF 6 and Ar/O 2 ) at pressures from 10 −3 to 5 Torr in discharge systems with different configurations of electric and magnetic fields revealed a specific t...
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| Published in: | Plasma physics reports 2012-01, Vol.38 (1), p.71-78 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
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| cited_by | cdi_FETCH-LOGICAL-c316t-7d0c4fa738fd4db7c701f03a4164fe5597f64b6ffd0a11426fe32e892186ae893 |
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| cites | cdi_FETCH-LOGICAL-c316t-7d0c4fa738fd4db7c701f03a4164fe5597f64b6ffd0a11426fe32e892186ae893 |
| container_end_page | 78 |
| container_issue | 1 |
| container_start_page | 71 |
| container_title | Plasma physics reports |
| container_volume | 38 |
| creator | Khodachenko, G. V. Mozgrin, D. V. Fetisov, I. K. Stepanova, T. V. |
| description | Experiments with quasi-steady high-current discharges in crossed
E
×
B
fields in various gases (Ar, N
2
, H
2
, and SF
6
) and gas mixtures (Ar/SF
6
and Ar/O
2
) at pressures from 10
−3
to 5 Torr in discharge systems with different configurations of electric and magnetic fields revealed a specific type of stable low-voltage discharge that does not transform into an arc. This type of discharge came to be known as a high-current diffuse discharge and, later, a nonsputtering impulse magnetron discharge. This paper presents results from experimental studies of the plasma parameters (the electron temperature, the plasma density, and the temperature of ions and atoms of the plasma-forming gas) of a high-current low-pressure diffuse discharge in crossed
E
×
B
fields. |
| doi_str_mv | 10.1134/S1063780X1112004X |
| format | article |
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E
×
B
fields in various gases (Ar, N
2
, H
2
, and SF
6
) and gas mixtures (Ar/SF
6
and Ar/O
2
) at pressures from 10
−3
to 5 Torr in discharge systems with different configurations of electric and magnetic fields revealed a specific type of stable low-voltage discharge that does not transform into an arc. This type of discharge came to be known as a high-current diffuse discharge and, later, a nonsputtering impulse magnetron discharge. This paper presents results from experimental studies of the plasma parameters (the electron temperature, the plasma density, and the temperature of ions and atoms of the plasma-forming gas) of a high-current low-pressure diffuse discharge in crossed
E
×
B
fields.</description><identifier>ISSN: 1063-780X</identifier><identifier>EISSN: 1562-6938</identifier><identifier>DOI: 10.1134/S1063780X1112004X</identifier><language>eng</language><publisher>Dordrecht: SP MAIK Nauka/Interperiodica</publisher><subject>70 PLASMA PHYSICS AND FUSION TECHNOLOGY ; ARGON ; Atomic ; ELECTRIC CURRENTS ; ELECTRIC DISCHARGES ; ELECTRIC FIELDS ; ELECTRIC POTENTIAL ; ELECTRON TEMPERATURE ; HYDROGEN ; ION TEMPERATURE ; IONS ; Low-Temperature Plasma ; MAGNETIC FIELDS ; MAGNETRONS ; MIXTURES ; Molecular ; NITROGEN ; Optical and Plasma Physics ; Physics ; Physics and Astronomy ; PLASMA ; PLASMA DENSITY ; PULSES ; SULFUR FLUORIDES</subject><ispartof>Plasma physics reports, 2012-01, Vol.38 (1), p.71-78</ispartof><rights>Pleiades Publishing, Ltd. 2012</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c316t-7d0c4fa738fd4db7c701f03a4164fe5597f64b6ffd0a11426fe32e892186ae893</citedby><cites>FETCH-LOGICAL-c316t-7d0c4fa738fd4db7c701f03a4164fe5597f64b6ffd0a11426fe32e892186ae893</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>230,314,777,781,882,27905,27906</link.rule.ids><backlink>$$Uhttps://www.osti.gov/biblio/22047436$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Khodachenko, G. V.</creatorcontrib><creatorcontrib>Mozgrin, D. V.</creatorcontrib><creatorcontrib>Fetisov, I. K.</creatorcontrib><creatorcontrib>Stepanova, T. V.</creatorcontrib><title>Nonsputtering impulse magnetron discharge</title><title>Plasma physics reports</title><addtitle>Plasma Phys. Rep</addtitle><description>Experiments with quasi-steady high-current discharges in crossed
E
×
B
fields in various gases (Ar, N
2
, H
2
, and SF
6
) and gas mixtures (Ar/SF
6
and Ar/O
2
) at pressures from 10
−3
to 5 Torr in discharge systems with different configurations of electric and magnetic fields revealed a specific type of stable low-voltage discharge that does not transform into an arc. This type of discharge came to be known as a high-current diffuse discharge and, later, a nonsputtering impulse magnetron discharge. This paper presents results from experimental studies of the plasma parameters (the electron temperature, the plasma density, and the temperature of ions and atoms of the plasma-forming gas) of a high-current low-pressure diffuse discharge in crossed
E
×
B
fields.</description><subject>70 PLASMA PHYSICS AND FUSION TECHNOLOGY</subject><subject>ARGON</subject><subject>Atomic</subject><subject>ELECTRIC CURRENTS</subject><subject>ELECTRIC DISCHARGES</subject><subject>ELECTRIC FIELDS</subject><subject>ELECTRIC POTENTIAL</subject><subject>ELECTRON TEMPERATURE</subject><subject>HYDROGEN</subject><subject>ION TEMPERATURE</subject><subject>IONS</subject><subject>Low-Temperature Plasma</subject><subject>MAGNETIC FIELDS</subject><subject>MAGNETRONS</subject><subject>MIXTURES</subject><subject>Molecular</subject><subject>NITROGEN</subject><subject>Optical and Plasma Physics</subject><subject>Physics</subject><subject>Physics and Astronomy</subject><subject>PLASMA</subject><subject>PLASMA DENSITY</subject><subject>PULSES</subject><subject>SULFUR FLUORIDES</subject><issn>1063-780X</issn><issn>1562-6938</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2012</creationdate><recordtype>article</recordtype><recordid>eNp9kEFLAzEUhIMoWKs_wNuCJw-r7yXZZHuUolUoelCht5Bmk3aLmyxJevDfm1Jvgqd58M08mCHkGuEOkfH7dwTBZAsrRKQAfHVCJtgIWosZa0_LXXB94OfkIqUdAGLb4ITcvgafxn3ONvZ-U_XDuP9Kthr0xtscg6-6Ppmtjht7Sc6cLuzqV6fk8-nxY_5cL98WL_OHZW0YilzLDgx3WrLWdbxbSyMBHTDNUXBnm2YmneBr4VwHGpFT4Syjtp1RbIUuyqbk5vg3pNyrZPpszdYE763JilLgkjNRXHh0mRhSitapMfaDjt8KQR0WUX8WKRl6zKTxUNZGtQv76EuZf0I_x-xiSg</recordid><startdate>20120101</startdate><enddate>20120101</enddate><creator>Khodachenko, G. V.</creator><creator>Mozgrin, D. V.</creator><creator>Fetisov, I. K.</creator><creator>Stepanova, T. V.</creator><general>SP MAIK Nauka/Interperiodica</general><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope></search><sort><creationdate>20120101</creationdate><title>Nonsputtering impulse magnetron discharge</title><author>Khodachenko, G. V. ; Mozgrin, D. V. ; Fetisov, I. K. ; Stepanova, T. V.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c316t-7d0c4fa738fd4db7c701f03a4164fe5597f64b6ffd0a11426fe32e892186ae893</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2012</creationdate><topic>70 PLASMA PHYSICS AND FUSION TECHNOLOGY</topic><topic>ARGON</topic><topic>Atomic</topic><topic>ELECTRIC CURRENTS</topic><topic>ELECTRIC DISCHARGES</topic><topic>ELECTRIC FIELDS</topic><topic>ELECTRIC POTENTIAL</topic><topic>ELECTRON TEMPERATURE</topic><topic>HYDROGEN</topic><topic>ION TEMPERATURE</topic><topic>IONS</topic><topic>Low-Temperature Plasma</topic><topic>MAGNETIC FIELDS</topic><topic>MAGNETRONS</topic><topic>MIXTURES</topic><topic>Molecular</topic><topic>NITROGEN</topic><topic>Optical and Plasma Physics</topic><topic>Physics</topic><topic>Physics and Astronomy</topic><topic>PLASMA</topic><topic>PLASMA DENSITY</topic><topic>PULSES</topic><topic>SULFUR FLUORIDES</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Khodachenko, G. V.</creatorcontrib><creatorcontrib>Mozgrin, D. V.</creatorcontrib><creatorcontrib>Fetisov, I. K.</creatorcontrib><creatorcontrib>Stepanova, T. V.</creatorcontrib><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>Plasma physics reports</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Khodachenko, G. V.</au><au>Mozgrin, D. V.</au><au>Fetisov, I. K.</au><au>Stepanova, T. V.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Nonsputtering impulse magnetron discharge</atitle><jtitle>Plasma physics reports</jtitle><stitle>Plasma Phys. Rep</stitle><date>2012-01-01</date><risdate>2012</risdate><volume>38</volume><issue>1</issue><spage>71</spage><epage>78</epage><pages>71-78</pages><issn>1063-780X</issn><eissn>1562-6938</eissn><abstract>Experiments with quasi-steady high-current discharges in crossed
E
×
B
fields in various gases (Ar, N
2
, H
2
, and SF
6
) and gas mixtures (Ar/SF
6
and Ar/O
2
) at pressures from 10
−3
to 5 Torr in discharge systems with different configurations of electric and magnetic fields revealed a specific type of stable low-voltage discharge that does not transform into an arc. This type of discharge came to be known as a high-current diffuse discharge and, later, a nonsputtering impulse magnetron discharge. This paper presents results from experimental studies of the plasma parameters (the electron temperature, the plasma density, and the temperature of ions and atoms of the plasma-forming gas) of a high-current low-pressure diffuse discharge in crossed
E
×
B
fields.</abstract><cop>Dordrecht</cop><pub>SP MAIK Nauka/Interperiodica</pub><doi>10.1134/S1063780X1112004X</doi><tpages>8</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 1063-780X |
| ispartof | Plasma physics reports, 2012-01, Vol.38 (1), p.71-78 |
| issn | 1063-780X 1562-6938 |
| language | eng |
| recordid | cdi_osti_scitechconnect_22047436 |
| source | Springer Link |
| subjects | 70 PLASMA PHYSICS AND FUSION TECHNOLOGY ARGON Atomic ELECTRIC CURRENTS ELECTRIC DISCHARGES ELECTRIC FIELDS ELECTRIC POTENTIAL ELECTRON TEMPERATURE HYDROGEN ION TEMPERATURE IONS Low-Temperature Plasma MAGNETIC FIELDS MAGNETRONS MIXTURES Molecular NITROGEN Optical and Plasma Physics Physics Physics and Astronomy PLASMA PLASMA DENSITY PULSES SULFUR FLUORIDES |
| title | Nonsputtering impulse magnetron discharge |
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