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Development of a synchrotron biaxial tensile device for in situ characterization of thin films mechanical response
We have developed on the DIFFABS-SOLEIL beamline a biaxial tensile machine working in the synchrotron environment for in situ diffraction characterization of thin polycrystalline films mechanical response. The machine has been designed to test compliant substrates coated by the studied films under c...
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Published in: | Review of scientific instruments 2010-10, Vol.81 (10), p.103903-103903-8 |
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Main Authors: | , , , , , , , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | We have developed on the DIFFABS-SOLEIL beamline a biaxial tensile machine working in the synchrotron environment for
in situ
diffraction characterization of thin polycrystalline films mechanical response. The machine has been designed to test compliant substrates coated by the studied films under controlled, applied strain field. Technological challenges comprise the sample design including fixation of the substrate ends, the related generation of a uniform strain field in the studied (central) volume, and the operations from the beamline pilot. Preliminary tests on 150 nm thick W films deposited onto polyimide cruciform substrates are presented. The obtained results for applied strains using x-ray diffraction and digital image correlation methods clearly show the full potentialities of this new setup. |
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ISSN: | 0034-6748 1089-7623 |
DOI: | 10.1063/1.3488628 |