Microfabricated atomic vapor cell arrays for magnetic field measurements

We describe a method for charging atomic vapor cells with cesium and buffer gas. By this, it is possible to adjust the buffer gas pressure in the cells with good accuracy. Furthermore, we present a new design of microfabricated vapor cell arrays, which combine silicon wafer based microfabrication an...

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Bibliographic Details
Published in:Review of scientific instruments 2011-03, Vol.82 (3), p.033111-033111-4
Main Authors: Woetzel, S., Schultze, V., IJsselsteijn, R., Schulz, T., Anders, S., Stolz, R., Meyer, H.-G.
Format: Article
Language:English
Subjects:
ACCURACY
Alkalies - chemistry
Azides - chemistry
BUFFERS
CESIUM
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
DESIGN
Gases - chemistry
INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
MAGNETIC FIELDS
Magnetics - instrumentation
Microscopy
Microtechnology - instrumentation
Pressure
SENSITIVITY
SILICON
ULTRASONIC MACHINING
VAPORS
Volatilization
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Description
Summary:We describe a method for charging atomic vapor cells with cesium and buffer gas. By this, it is possible to adjust the buffer gas pressure in the cells with good accuracy. Furthermore, we present a new design of microfabricated vapor cell arrays, which combine silicon wafer based microfabrication and ultrasonic machining to achieve the arrays of thermally separated cells with 50 mm3 volume. With cells fabricated in the outlined way, intrinsic magnetic field sensitivities down to 300 fT/Hz1/2 are reached.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.3559304