Enhanced stress durability of nano resonators with scandium doped electrodes

To explore mechanical stress durability of thin aluminum–scandium (AlSc) films, 0.86 GHz nano resonators with AlSc electrodes have been manufactured. Four different samples have been prepared altering the Sc content in the alloy between 0.0% and 2.5%. A final lift-off step accomplished manufacture p...

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Bibliographic Details
Published in:Materials characterization 2010-11, Vol.61 (11), p.1054-1060
Main Authors: Nüssl, R., Jewula, T., Binninger, C., Drozd, R., Ruile, W., Beckmeier, D., Sulima, T., Eisele, I., Hansch, W.
Format: Article
Language:English
Subjects:
ALUMINIUM
ALUMINIUM BASE ALLOYS
Aluminum
ATOMIC FORCE MICROSCOPY
BACKSCATTERING
Cross-disciplinary physics: materials science
rheology
Devices
DOPED MATERIALS
Durability
EBSD
ELECTRODES
ELECTRON DIFFRACTION
Exact sciences and technology
FATIGUE
GHZ RANGE
Grain structure
High power durable
MATERIALS SCIENCE
Nano resonators
NANOSCIENCE AND NANOTECHNOLOGY
Nanostructure
Phase diagrams and microstructures developed by solidification and solid-solid phase transformations
Physics
RESONATORS
SCANDIUM
SCANDIUM ALLOYS
SCANNING ELECTRON MICROSCOPY
Solidification
Stress
STRESSES
TEXTURE
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Summary:To explore mechanical stress durability of thin aluminum–scandium (AlSc) films, 0.86 GHz nano resonators with AlSc electrodes have been manufactured. Four different samples have been prepared altering the Sc content in the alloy between 0.0% and 2.5%. A final lift-off step accomplished manufacture procedure of the devices. The resonators have been operated with heavy load to determine power durability. The resonators with AlSc electrodes show increased power durability compared to conventional Al metallized devices. Texture and grain structure of all films have been investigated by means of electron backscatter diffraction (EBSD) and atomic force microscopy (AFM). Material fatigue of electrodes has been visualized by scanning electron microscopy (SEM). The refined grain structure of these alloys can explain the enhanced mechanical stress durability of AlSc electrodes. ►Enhanced power durability of SAW devices with Sc doped electrodes. ►Refined grain structure of Sc doped Al films. ►Sudden device breakdown of highly Sc doped devices.
ISSN:1044-5803
1873-4189
DOI:10.1016/j.matchar.2010.06.018