Effect of bulk electric field reversal on the bounce resonance heating in dual-frequency capacitively coupled electronegative plasmas

The electron bounce resonance heating (BRH) in dual-frequency capacitively coupled plasmas operated in oxygen and argon has been studied by different experimental methods. In comparison with the electropositive argon discharge, the BRH in an electronegative discharge occurs at larger electrode gaps....

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Bibliographic Details
Published in:Applied physics letters 2012-09, Vol.101 (11)
Main Authors: Liu, Yong-Xin, Zhang, Quan-Zhi, Liu, Jia, Song, Yuan-Hong, Bogaerts, Annemie, Wang, You-Nian
Format: Article
Language:English
Subjects:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Electric discharges
ELECTRIC FIELDS
Electrodes
ELECTRONEGATIVITY
Electropositivity
Heating
HIGH-FREQUENCY DISCHARGES
OXYGEN
PLASMA
PLASMA HEATING
PLASMA SHEATH
PLASMA SIMULATION
Plasmas
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Summary:The electron bounce resonance heating (BRH) in dual-frequency capacitively coupled plasmas operated in oxygen and argon has been studied by different experimental methods. In comparison with the electropositive argon discharge, the BRH in an electronegative discharge occurs at larger electrode gaps. Kinetic particle simulations reveal that in the oxygen discharge, the bulk electric field becomes quite strong and is out of phase with the sheath field. Therefore, it retards the resonant electrons when traversing the bulk, resulting in a suppressed BRH. This effect becomes more pronounced at lower high-frequency power, when the discharge mode changes from electropositive to electronegative.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4751984