Electrochemical properties of Li[Li{sub 0.2}Mn{sub 0.54}Co{sub 0.13}Ni{sub 0.13}]O{sub 2} cathode thin film by RF sputtering for all-solid-state lithium battery

• Published in: Journal of solid state chemistry 2012-12, Vol.196
• Main Authors: Yim, Haena, Department of chemical engineering, KyungHee University, Yoingin 449-701, Yeon Kong, Woo, Chul Kim, Young, Yoon, Seok-Jin, Choi, Ji-Won
• Format: Article
• Language: English
• Subjects: ATOMIC FORCE MICROSCOPY; CAPACITY; CATHODES; DEPOSITION; ELECTROCHEMISTRY; INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY; LITHIUM; MAGNETRONS; MATERIALS SCIENCE; PEAKS; SCANNING ELECTRON MICROSCOPY; SILICON OXIDES; SOLIDS; SPACE GROUPS; SPUTTERING; SUBSTRATES; THIN FILMS; X-RAY DIFFRACTION
• ISSN: 0022-4596; 1095-726X
• DOI: 10.1016/J.JSSC.2012.06.006

The Li[Li{sub 0.2}Mn{sub 0.56}Ni{sub 0.13}Co{sub 0.13}]O{sub 2} thin films were prepared by radio frequency magnetron sputtering on Pt/Ti/SiO{sub 2}/Si substrate with target contained a 5% excess of lithium precursor. Thin films were deposited under various deposition conditions such as working pressure, gas ratio of Ar and O{sub 2}, and the temperature of in-situ annealing treatment. The thin films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AFM). The electrochemical property was estimated by a WBC3000 cycler with Li|Li[Li{sub 0.2}Mn{sub 0.54}Ni{sub 0.13}Co{sub 0.13}]O{sub 2} half-type cell at 1C charge/discharge rate. The (0 0 3) and (1 0 4) diffraction peaks which represent layered {alpha}-NaFeO{sub 2} type structure (space group R-3m) were observed. Optimal magnetron sputtering conditions were detected. The 500 Degree-Sign C annealed thin film after deposited at 10 m Torr in Ar:O{sub 2}=3:1 shows a high discharge capacity of around 62 {mu}Ah/cm{sup 2} {mu}m with a high cyclic retention. - Graphical abstract: The Li[Li{sub 0.2}Mn{sub 0.56}Ni{sub 0.13}Co{sub 0.13}]O{sub 2} films is suitable for Lithium thin film battery. The film exhibits great discharge capacity (62 {mu}Ah/cm{sup 2} {mu}m) up to 200 cycles. Highlights: Black-Right-Pointing-Pointer High capacity thin films were deposited by RF magnetron sputtering. Black-Right-Pointing-Pointer Sputtering conditions were optimized by structural and electrochemical analysis. Black-Right-Pointing-Pointer Li[Li{sub 0.2}Mn{sub 0.56}Ni{sub 0.13}Co{sub 0.13}]O{sub 2} thin film shows a high capacity, 62 {mu}Ah/cm{sup 2} {mu}m. Black-Right-Pointing-Pointer The thin film shows an excellent cycling stability up to 200 cycles.