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Investigation of the transition layer in 3C-SiC/6H-SiC heterostructures

Transmission electron microscopy and the cathodoluminescence method are used to study the transition region in 3 C -SiC/6 H -SiC heterostructures. It is shown that this region is, as a rule, constituted by alternating 3 C -SiC and 6 H -SiC layers with the possible inclusion of other silicon carbide...

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Published in:Semiconductors (Woodbury, N.Y.) N.Y.), 2013-11, Vol.47 (11), p.1539-1543
Main Authors: Lebedev, A. A., Zamorianskaya, M. V., Davydov, S. Yu, Kirilenko, D. A., Lebedev, S. P., Sorokin, L. M., Shustov, D. B., Scheglov, M. P.
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Language:English
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Summary:Transmission electron microscopy and the cathodoluminescence method are used to study the transition region in 3 C -SiC/6 H -SiC heterostructures. It is shown that this region is, as a rule, constituted by alternating 3 C -SiC and 6 H -SiC layers with the possible inclusion of other silicon carbide polytypes. An assumption is made that this structure of the transition region can be explained in terms of the model of spinodal decomposition.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782613110134