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Investigation of the transition layer in 3C-SiC/6H-SiC heterostructures
Transmission electron microscopy and the cathodoluminescence method are used to study the transition region in 3 C -SiC/6 H -SiC heterostructures. It is shown that this region is, as a rule, constituted by alternating 3 C -SiC and 6 H -SiC layers with the possible inclusion of other silicon carbide...
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Published in: | Semiconductors (Woodbury, N.Y.) N.Y.), 2013-11, Vol.47 (11), p.1539-1543 |
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Main Authors: | , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Transmission electron microscopy and the cathodoluminescence method are used to study the transition region in 3
C
-SiC/6
H
-SiC heterostructures. It is shown that this region is, as a rule, constituted by alternating 3
C
-SiC and 6
H
-SiC layers with the possible inclusion of other silicon carbide polytypes. An assumption is made that this structure of the transition region can be explained in terms of the model of spinodal decomposition. |
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ISSN: | 1063-7826 1090-6479 |
DOI: | 10.1134/S1063782613110134 |