A spatially resolved retarding field energy analyzer design suitable for uniformity analysis across the surface of a semiconductor wafer

A novel retarding field energy analyzer design capable of measuring the spatial uniformity of the ion energy and ion flux across the surface of a semiconductor wafer is presented. The design consists of 13 individual, compact-sized, analyzers, all of which are multiplexed and controlled by a single...

Full description

Saved in:
Bibliographic Details
Published in:Review of scientific instruments 2014-04, Vol.85 (4), p.043509-043509
Main Authors: Sharma, S, Gahan, D, Kechkar, S, Daniels, S, Hopkins, M B
Format: Article
Language:English
Subjects:
Analyzers
APPROXIMATIONS
DESIGN
Design analysis
ELECTRODES
Energy
ENERGY SPECTRA
Ion energy distribution
Ion flux
MANUFACTURING
MATERIALS SCIENCE
Nonuniformity
ORIFICES
PLASMA
Retarding
Scientific apparatus & instruments
SEMICONDUCTOR MATERIALS
SENSORS
Tolerances
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A novel retarding field energy analyzer design capable of measuring the spatial uniformity of the ion energy and ion flux across the surface of a semiconductor wafer is presented. The design consists of 13 individual, compact-sized, analyzers, all of which are multiplexed and controlled by a single acquisition unit. The analyzers were tested to have less than 2% variability from unit to unit due to tight manufacturing tolerances. The main sensor assembly consists of a 300 mm disk to mimic a semiconductor wafer and the plasma sampling orifices of each sensor are flush with disk surface. This device is placed directly on top of the rf biased electrode, at the wafer location, in an industrial capacitively coupled plasma reactor without the need for any modification to the electrode structure. The ion energy distribution, average ion energy, and average ion flux were measured at the 13 locations over the surface of the powered electrode to determine the degree of spatial nonuniformity. The ion energy and ion flux are shown to vary by approximately 20% and 5%, respectively, across the surface of the electrode for the range of conditions investigated in this study.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.4870900