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Ab initio studies of early stages of AlN and GaN growth on 4H-SiC
Processes of aluminum and gallium adsorption on Si- and C-terminated 4H-SiC{0001} surfaces have been studied within the DFT framework. Al and Ga coverages ranging from a submonolayer to one monolayer have been considered. The results show that Al binds more strongly to both surfaces than Ga and the...
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Main Authors: | , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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Summary: | Processes of aluminum and gallium adsorption on Si- and C-terminated 4H-SiC{0001} surfaces have been studied within the DFT framework. Al and Ga coverages ranging from a submonolayer to one monolayer have been considered. The results show that Al binds more strongly to both surfaces than Ga and the binding of both metals is stronger to the C-terminated than to Si-terminated surface of SiC. The lateral lattice sites occupied by Al and Ga atoms at one monolayer are different and it is due to a different charge transfer from metal to the substrate. |
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ISSN: | 0094-243X 1551-7616 |
DOI: | 10.1063/1.4848282 |