Controlling magnetic anisotropy in La{sub 0.7}Sr{sub 0.3}MnO{sub 3} nanostructures

We have developed a chlorine based dry etching process for nanopatterning the ferromagnetic oxide La{sub 0.7}Sr{sub 0.3}MnO{sub 3} (LSMO). Large arrays of millions of identical structures have been fabricated from thin LSMO films by electron-beam lithography and reactive ion etching. SQUID magnetome...

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Bibliographic Details
Published in:Applied physics letters 2014-02, Vol.104 (5)
Main Authors: Wahler, M., Büttner, B., Blaschek, H.-H., Homonnay, N., Wid, O., O'Shea, K. J., McGrouther, D., MacLaren, D. A., Schmidt, G., IZM, Martin-Luther-Universität Halle-Wittenberg, D-06099 Halle
Format: Article
Language:English
Subjects:
ANISOTROPY
CHLORINE
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
CURIE POINT
ELECTRON BEAMS
ETCHING
FERROMAGNETIC MATERIALS
LANTHANUM COMPOUNDS
LAYERS
MAGNETIZATION
MANGANATES
MASKING
NANOSCIENCE AND NANOTECHNOLOGY
NANOSTRUCTURES
SQUID DEVICES
STRONTIUM COMPOUNDS
THIN FILMS
TRANSMISSION ELECTRON MICROSCOPY
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Summary:We have developed a chlorine based dry etching process for nanopatterning the ferromagnetic oxide La{sub 0.7}Sr{sub 0.3}MnO{sub 3} (LSMO). Large arrays of millions of identical structures have been fabricated from thin LSMO films by electron-beam lithography and reactive ion etching. SQUID magnetometry demonstrates that patterned nanostructures with lateral dimensions down to 100 nm retain their full magnetization and the Curie temperature of the bulk layer. In addition, their shape anisotropy is sufficient to overcome the crystalline anisotropy of the bulk. High resolution scanning transmission electron microscopy shows that crystallinity is preserved even at the edges of the nanostructures.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4863978