Ceramic thick film humidity sensor based on MgTiO{sub 3} + LiF

• Published in: Materials research bulletin 2013-10, Vol.48 (10)
• Main Authors: Kassas, Ahmad, Laboratoire Universitaire des Sciences Appliquées de Cherbourg, Bernard, Jérôme, Lelièvre, Céline, Besq, Anthony, Guhel, Yannick, Houivet, David, Boudart, Bertrand, Lakiss, Hassan, Faculty of Engineering, Section III, Hariri Campus, Hadath, Beirut, Hamieh, Tayssir
• Format: Article
• Language: English
• Subjects: CERAMICS; DIELECTRIC MATERIALS; HUMIDITY; LITHIUM FLUORIDES; MATERIALS SCIENCE; MICROSTRUCTURE; SOL-GEL PROCESS; SPIN-ON COATING; THERMAL GRAVIMETRIC ANALYSIS
• ISSN: 0025-5408; 1873-4227
• DOI: 10.1016/J.MATERRESBULL.2013.06.010

Graphical abstract: - Highlights: • The fabricated sensor based on MgTiO{sub 3} + LiF materials used the spin coating technology. • The response time is 70 s to detect variation between 5 and 95% relative humidity. • The addition of Scleroglucan controls the viscosity and decreases the roughness of thick film surface. • This humidity sensor is a promising, low-cost, high-quality, reliable ceramic films, that is highly sensitive to humidity. - Abstract: The feasibility of humidity sensor, consisting of a thick layer of MgTiO{sub 3}/LiF materials on alumina substrate, was studied. The thermal analysis TGA-DTGA and dilatometric analysis worked out to confirm the sintering temperature. An experimental plan was applied to describe the effects of different parameters in the development of the thick film sensor. Structural and microstructural characterizations of the developed thick film were made. Rheological study with different amounts of a thickener (scleroglucan “sclg”), showing the behavior variation, as a function of sclg weight % was illustrated and rapprochement with the results of thickness variation as a function of angular velocity applied in the spin coater. The electrical and dielectric measurements confirmed the sensitivity of the elaborated thick film against moisture, along with low response time.