Density dependence of the room temperature thermal conductivity of atomic layer deposition-grown amorphous alumina (Al2O3)

We report on the thermal conductivity of atomic layer deposition-grown amorphous alumina thin films as a function of atomic density. Using time domain thermoreflectance, we measure the thermal conductivity of the thin alumina films at room temperature. The thermal conductivities vary ∼35% for a near...

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Bibliographic Details
Published in:Applied physics letters 2014-06, Vol.104 (25)
Main Authors: Gorham, Caroline S., Gaskins, John T., Parsons, Gregory N., Losego, Mark D., Hopkins, Patrick E.
Format: Article
Language:English
Subjects:
ACOUSTICS
ALUMINIUM OXIDES
Aluminum oxide
Applied physics
Atomic layer epitaxy
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Conductivity
DENSITY
Effective medium theory
Heat conductivity
Heat transfer
Herbivores
Room temperature
SOUND WAVES
SUBSTRATES
Temperature dependence
TEMPERATURE RANGE 0273-0400 K
THERMAL CONDUCTIVITY
THIN FILMS
VELOCITY
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Summary:We report on the thermal conductivity of atomic layer deposition-grown amorphous alumina thin films as a function of atomic density. Using time domain thermoreflectance, we measure the thermal conductivity of the thin alumina films at room temperature. The thermal conductivities vary ∼35% for a nearly 15% change in atomic density and are substrate independent. No density dependence of the longitudinal sound speeds is observed with picosecond acoustics. The density dependence of the thermal conductivity agrees well with a minimum limit to thermal conductivity model that is modified with a differential effective-medium approximation.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4885415