High resolution coherent diffractive imaging with a table-top extreme ultraviolet source

We demonstrate a resolution of 45 nm with a sample size down to 3 μm × 3 μm is achieved in a short exposure time of 2 s, from the diffraction pattern generated by a table-top high harmonic source at around 30 nm. By using a narrow-bandwidth focusing mirror, the diffraction pattern's quality is...

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Bibliographic Details
Published in:Journal of applied physics 2014-11, Vol.116 (17)
Main Authors: Vu Le, Hoang, Ba Dinh, Khuong, Hannaford, Peter, Van Dao, Lap
Format: Article
Language:English
Subjects:
Applied physics
COHERENT RADIATION
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Curvature
DIFFRACTION
Diffraction patterns
EXTREME ULTRAVIOLET RADIATION
Image quality
Image reconstruction
Image resolution
Ion beams
LASER RADIATION
MIRRORS
RESOLUTION
Tables
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Summary:We demonstrate a resolution of 45 nm with a sample size down to 3 μm × 3 μm is achieved in a short exposure time of 2 s, from the diffraction pattern generated by a table-top high harmonic source at around 30 nm. By using a narrow-bandwidth focusing mirror, the diffraction pattern's quality is improved and the required exposure time is significantly reduced. In order to obtain a high quality of the reconstructed image, the ratio of the beam size to the sample size and the curvature of the focused beam need to be considered in the reconstruction process. This new experimental scheme is very promising for imaging sub-10 nm scale objects with a table-top source based on a small inexpensive femtosecond laser system.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.4900982