Fs-laser processing of polydimethylsiloxane

We present an experimental analysis on surface structuring of polydimethylsiloxane films with UV (263 nm) femtosecond laser pulses, in air. Laser processed areas are analyzed by optical microscopy, SEM, and μ-Raman spectroscopy. The laser-treated sample shows the formation of a randomly nanostructur...

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Bibliographic Details
Published in:Journal of applied physics 2014-07, Vol.116 (2)
Main Authors: Atanasov, Petar A., Nedyalkov, Nikolay N., Valova, Eugenia I., Georgieva, Zhenya S., Armyanov, Stefan A., Kolev, Konstantin N., Amoruso, Salvatore, Wang, Xuan, Bruzzese, Ricardo, Sawczak, Miroslaw, Śliwiński, Gerard
Format: Article
Language:English
Subjects:
Applied physics
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
EXCITATION
Femtosecond pulses
Laser processing
LASER RADIATION
Lasers
MEMS
Metallizing
Microelectromechanical systems
Morphology
Nanoelectromechanical systems
Nanosecond pulses
NANOSTRUCTURES
OPTICAL MICROSCOPY
Organic chemistry
Polydimethylsiloxane
RAMAN SPECTRA
RAMAN SPECTROSCOPY
RANDOMNESS
SCANNING ELECTRON MICROSCOPY
Spectrum analysis
SURFACES
WAVELENGTHS
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Summary:We present an experimental analysis on surface structuring of polydimethylsiloxane films with UV (263 nm) femtosecond laser pulses, in air. Laser processed areas are analyzed by optical microscopy, SEM, and μ-Raman spectroscopy. The laser-treated sample shows the formation of a randomly nanostructured surface morphology. μ-Raman spectra, carried out at both 514 and 785 nm excitation wavelengths, prior and after laser treatment allow evidencing the changes in the sample structure. The influence of the laser fluence on the surface morphology is studied. Finally, successful electro-less metallization of the laser-processed sample is achieved, even after several months from the laser-treatment contrary to previous observation with nanosecond pulses. Our findings address the effectiveness of fs-laser treatment and chemical metallization of polydimethylsiloxane films with perspective technological interest in micro-fabrication devices for MEMS and nano-electromechanical systems.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.4887812