Surface and sub-surface thermal oxidation of thin ruthenium films

A mixed 2D (film) and 3D (nano-column) growth of ruthenium oxide has been experimentally observed for thermally oxidized polycrystalline ruthenium thin films. Furthermore, in situ x-ray reflectivity upon annealing allowed the detection of 2D film growth as two separate layers consisting of low densi...

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Bibliographic Details
Published in:Applied physics letters 2014-09, Vol.105 (13)
Main Authors: Coloma Ribera, R., van de Kruijs, R. W. E., Kokke, S., Zoethout, E., Yakshin, A. E., Bijkerk, F.
Format: Article
Language:English
Subjects:
ANNEALING
Applied physics
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
CRYSTAL GROWTH
Density
DETECTION
DIFFUSION
Diffusion layers
Diffusion rate
Film growth
HEAT TREATMENTS
LAYERS
OXIDATION
Oxide coatings
POLYCRYSTALS
REFLECTIVITY
RUTHENIUM
Ruthenium oxide
RUTHENIUM OXIDES
SURFACES
THIN FILMS
X RADIATION
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Summary:A mixed 2D (film) and 3D (nano-column) growth of ruthenium oxide has been experimentally observed for thermally oxidized polycrystalline ruthenium thin films. Furthermore, in situ x-ray reflectivity upon annealing allowed the detection of 2D film growth as two separate layers consisting of low density and high density oxides. Nano-columns grow at the surface of the low density oxide layer, with the growth rate being limited by diffusion of ruthenium through the formed oxide film. Simultaneously, with the growth of the columns, sub-surface high density oxide continues to grow limited by diffusion of oxygen or ruthenium through the oxide film.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4896993