High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient

AlN and AlScN thin films with 27% scandium (Sc) were synthesized by DC magnetron sputtering deposition and used to fabricate surface acoustic wave (SAW) devices. Compared with AlN-based devices, the AlScN SAW devices exhibit much better transmission properties. Scandium doping results in electromech...

Full description

Saved in:
Bibliographic Details
Published in:Applied physics letters 2014-09, Vol.105 (13)
Main Authors: Wang, Wenbo, Mayrhofer, Patrick M., He, Xingli, Gillinger, Manuel, Ye, Zhi, Wang, Xiaozhi, Bittner, Achim, Schmid, Ulrich, Luo, J. K.
Format: Article
Language:English
Subjects:
ALUMINIUM NITRIDES
Aluminum nitride
Applied physics
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
COUPLING
Coupling coefficients
DEPOSITION
Devices
EFFICIENCY
Energy harvesting
Magnetron sputtering
MAGNETRONS
Material properties
PIEZOELECTRICITY
SCANDIUM
SCANDIUM COMPOUNDS
SENSORS
SOUND WAVES
SPUTTERING
Surface acoustic wave devices
Surface acoustic waves
SURFACE PROPERTIES
SURFACES
THICKNESS
THIN FILMS
TRANSMISSION
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:AlN and AlScN thin films with 27% scandium (Sc) were synthesized by DC magnetron sputtering deposition and used to fabricate surface acoustic wave (SAW) devices. Compared with AlN-based devices, the AlScN SAW devices exhibit much better transmission properties. Scandium doping results in electromechanical coupling coefficient, K2, in the range of 2.0% ∼ 2.2% for a wide normalized thickness range, more than a 300% increase compared to that of AlN-based SAW devices, thus demonstrating the potential applications of AlScN in high frequency resonators, sensors, and high efficiency energy harvesting devices. The coupling coefficients of the present AlScN based SAW devices are much higher than that of the theoretical calculation based on some assumptions for AlScN piezoelectric material properties, implying there is a need for in-depth investigations on the material properties of AlScN.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4896853