Influence of growth time on crystalline structure, morphologic and optical properties of In{sub 2}O{sub 3} thin films

• Published in: AIP conference proceedings 2015-03, Vol.1653 (1)
• Main Authors: Attaf, A., Bouhdjar, A., Saidi, H., Benkhetta, Y., Bendjedidi, H., Nouadji, M., Lehraki, N.
• Format: Article
• Language: English
• Subjects: CRYSTAL GROWTH; CUBIC LATTICES; ETHANOL; EV RANGE; GRAIN ORIENTATION; GRAIN SIZE; INDIUM CHLORIDES; INDIUM OXIDES; MATERIALS SCIENCE; OPTICAL PROPERTIES; POLYCRYSTALS; SUBSTRATES; THIN FILMS; X-RAY DIFFRACTION
• ISSN: 0094-243X; 1551-7616
• DOI: 10.1063/1.4914207

Indium oxide (In{sub 2}O{sub 3}) thin films are successfully deposited on glass substrate at different deposition timings by ultrasonic spray technique using Indium chloride (InCl{sub 3}) material source witch is prepared with dissolvent Ethanol (C{sub 2}H{sub 5}-OH), the physical properties of these films are characterized by XRD, MEB,UV-visible. XRD analysis revealed that the films are polycrystalline in nature having centered cubic crystal structure and symmetry space group I2{sub 1}3 with a preferred grain orientation along to (222) plane when the deposition time changes from 4 to 10 min but after t = 10 min, especially when t = 13 min we found that the majority of grains preferred the plane (400). The maximum value of grain size D = 61,51 nm is attained for In{sub 2}O{sub 3} films grown at t =10 min. the average transmittance is about 72%, The optical gap energy is found to decrease from 3.8 to 3.66 eV with growth time Increased from 4 to 10 min but after t = 10 min the value of E{sub g} will increase to 3.72 eV. A systematic study on the influence of growth time on the properties of In{sub 2}O{sub 3} thin films deposited by ultrasonic spray at 400 °C has been reported.