Metal negative ion beam extraction from a radio frequency ion source

A metal ion source of magnetron magnetic field geometry has been designed and operated with a Cu hollow target. Radio frequency power at 13.56 MHz is directly supplied to the hollow target to maintain plasma discharge and induce self-bias to the target for sputtering. The extraction of positive and...

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Bibliographic Details
Main Authors: Kanda, S, Yamada, N, Kasuya, T, Romero C F P, Wada, M
Format: Conference Proceeding
Language:English
Subjects:
ANIONS
ARGON IONS
BEAM CURRENTS
BEAM EXTRACTION
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
COPPER IONS
DESIGN
ELECTRIC DISCHARGES
ELECTRONS
Gas pressure
ION BEAMS
ION SOURCES
MAGNETIC FIELDS
MAGNETRONS
MHZ RANGE
Negative ions
PLASMA
Plasma jets
Radio frequency discharge
RADIOWAVE RADIATION
RF SYSTEMS
SPUTTERING
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Summary:A metal ion source of magnetron magnetic field geometry has been designed and operated with a Cu hollow target. Radio frequency power at 13.56 MHz is directly supplied to the hollow target to maintain plasma discharge and induce self-bias to the target for sputtering. The extraction of positive and negative Cu ion beams have been tested. The ion beam current ratio of Cu+ to Ar+ has reached up to 140% when Ar was used as the discharge support gas. Cu− ion beam was observed at 50 W RF discharge power and at a higher Ar gas pressure in the ion source. Improvement of poor RF power matching and suppression of electron current is indispensable for a stable Cu− ion beam production from the source.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.4916487