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Wall charging of a helicon antenna wrapped plasma filled dielectric tube

Dielectric wall charging of a cylindrical glass wall surrounded by a helicon antenna of 18 cm length is measured in a linear helicon plasma device with a diverging magnetic field. The ions because of their lesser mobility do not respond to the high frequency electric field and the electrons charge t...

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Bibliographic Details
Published in:Physics of plasmas 2015-01, Vol.22 (1)
Main Authors: Barada, Kshitish K., Chattopadhyay, P. K., Ghosh, J., Saxena, Y. C., Bora, D.
Format: Article
Language:English
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Summary:Dielectric wall charging of a cylindrical glass wall surrounded by a helicon antenna of 18 cm length is measured in a linear helicon plasma device with a diverging magnetic field. The ions because of their lesser mobility do not respond to the high frequency electric field and the electrons charge the wall to a negative DC potential also known as the DC self-bias. The wall potential in this device is characterized for different neutral pressure, magnetic field, and radio frequency (RF) power. Axial variation of wall potential shows higher self-bias potentials near the antenna rings. Ion magnetization in the source chamber increases both wall charging and plasma potential of the source due to confinement.
ISSN:1070-664X
1089-7674
DOI:10.1063/1.4906360