Catalyst synthesis and evaluation using an integrated atomic layer deposition synthesis–catalysis testing tool

• Published in: Review of scientific instruments 2015-08, Vol.86 (8)
• Main Authors: Camacho-Bunquin, Jeffrey, Shou, Heng, Marshall, Christopher L., Aich, Payoli, Department of Chemical Engineering, University of Illinois at Chicago, Chicago, Illinois 60607, Beaulieu, David R., Klotzsch, Helmut, Bachman, Stephen, Hock, Adam, Department of Chemistry, Illinois Institute of Technology, Chicago, Illinois 60616, Stair, Peter, Department of Chemistry, Northwestern University, Evanston, Illinois 60208
• Format: Article
• Language: English
• Subjects: ALUMINIUM OXIDES; CATALYSIS; CATALYSTS; CATS; HYDROGENATION; INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY; MASS SPECTROMETERS; PLATINUM; PRECURSOR; PROPYLENE; REDUCING AGENTS; SYNTHESIS; TESTING
• ISSN: 0034-6748; 1089-7623

An integrated atomic layer deposition synthesis-catalysis (I-ALD-CAT) tool was developed. It combines an ALD manifold in-line with a plug-flow reactor system for the synthesis of supported catalytic materials by ALD and immediate evaluation of catalyst reactivity using gas-phase probe reactions. The I-ALD-CAT delivery system consists of 12 different metal ALD precursor channels, 4 oxidizing or reducing agents, and 4 catalytic reaction feeds to either of the two plug-flow reactors. The system can employ reactor pressures and temperatures in the range of 10{sup −3} to 1 bar and 300–1000 K, respectively. The instrument is also equipped with a gas chromatograph and a mass spectrometer unit for the detection and quantification of volatile species from ALD and catalytic reactions. In this report, we demonstrate the use of the I-ALD-CAT tool for the synthesis of platinum active sites and Al{sub 2}O{sub 3} overcoats, and evaluation of catalyst propylene hydrogenation activity.