Development of Wien filter for small ion gun of surface analysis

The gas cluster ion beam (GCIB) and liquid metal ion beam have been studied in the context of ion beam usage for analytical equipment in applications such as X-ray photoelectron spectroscopy and secondary ion mass spectroscopy (SIMS). In particular, small ion sources are used for the secondary ion g...

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Bibliographic Details
Published in:Review of scientific instruments 2016-02, Vol.87 (2), p.02B706-02B706
Main Authors: Bahng, Jungbae, Hong, Jonggi, Choi, Myoung Choul, Won, Mi-Sook, Lee, Byoung-Seob
Format: Article
Language:English
Subjects:
ACCELERATION
ARGON IONS
CLUSTER BEAMS
Clusters
Collimation
FILTERS
INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ION BEAMS
Ion etching
ION MICROPROBE ANALYSIS
ION SOURCES
LIQUID METALS
MASS SPECTROSCOPY
Nozzles
PARTICLE ACCELERATORS
Scientific apparatus & instruments
Secondary ion mass spectroscopy
SKIMMERS
Spectrum analysis
Surface analysis (chemical)
Three dimensional analysis
Three dimensional models
THREE-DIMENSIONAL LATTICES
X-RAY PHOTOELECTRON SPECTROSCOPY
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Summary:The gas cluster ion beam (GCIB) and liquid metal ion beam have been studied in the context of ion beam usage for analytical equipment in applications such as X-ray photoelectron spectroscopy and secondary ion mass spectroscopy (SIMS). In particular, small ion sources are used for the secondary ion generation and ion etching. To set the context to this study, the SIMS project has been launched to develop ion-gun based analytical equipment for the Korea Basic Science Institute. The objective of the first stage of the project is the generation of argon beams with a GCIB system [A. Kirkpatrick, Nucl. Instrum. Methods Phys. Res., Sect. B 206, 830-837 (2003)] that consists of a nozzle, skimmer, ionizer, acceleration tube, separation system, transport system, and target. The Wien filter directs the selected cluster beam to the target system by exploiting the velocity difference of the generated particles from GCIB. In this paper, we present the theoretical modeling and three-dimensional electromagnetic analysis of the Wien filter, which can separate Ar(+) 2500 clusters from Ar(+) 2400 to Ar(+) 2600 clusters with a 1-mm collimator.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.4934599