Study and characterization of the irreversible transformation of electrically stressed planar Ti/TiO{sub x}/Ti junctions

We investigate the properties and characteristics of planar Ti/TiO{sub x}/Ti junctions, which consist of transverse TiO{sub x} lines drawn on Ti test patterns. Junctions are elaborated by means of local anodic oxidation using atomic force microscopy. An irreversible morphological transformation occu...

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Bibliographic Details
Published in:Journal of applied physics 2015-10, Vol.118 (14)
Main Authors: Guillaume, N., Puyoo, E., Le Berre, M., Albertini, D., Baboux, N., Chevalier, C., Ayadi, K., Grégoire, J., Gautier, B., Calmon, F.
Format: Article
Language:English
Subjects:
ATOMIC FORCE MICROSCOPY
CHEMICAL ANALYSIS
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
EMISSION
MIM JUNCTIONS
OXIDATION
POTENTIALS
RUTILE
STRESSES
TEMPERATURE DEPENDENCE
TITANIUM OXIDES
TRANSMISSION ELECTRON MICROSCOPY
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Summary:We investigate the properties and characteristics of planar Ti/TiO{sub x}/Ti junctions, which consist of transverse TiO{sub x} lines drawn on Ti test patterns. Junctions are elaborated by means of local anodic oxidation using atomic force microscopy. An irreversible morphological transformation occurring in a reproducible manner is observed when these planar junctions are electrically stressed under ambient atmosphere. Structural and chemical analyses based on transmission electron microscopy techniques reveal the extension of the initial amorphous TiO{sub x} into a crystalline rutile phase. This irreversible transformation is proven to vanish completely if the electrical stress occurs under vacuum atmosphere. Finally, we carry out temperature dependent electrical measurements in order to elucidate their conduction mechanism: Schottky emission above an ultra-low potential barrier is assumed to dominate under vacuum atmosphere whereas ionic conduction seems to prevail in air.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.4932646