III/V nano ridge structures for optical applications on patterned 300 mm silicon substrate

We report on an integration approach of III/V nano ridges on patterned silicon (Si) wafers by metal organic vapor phase epitaxy (MOVPE). Trenches of different widths (≤500 nm) were processed in a silicon oxide (SiO2) layer on top of a 300 mm (001) Si substrate. The MOVPE growth conditions were chose...

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Bibliographic Details
Published in:Applied physics letters 2016-08, Vol.109 (9)
Main Authors: Kunert, B., Guo, W., Mols, Y., Tian, B., Wang, Z., Shi, Y., Van Thourhout, D., Pantouvaki, M., Van Campenhout, J., Langer, R., Barla, K.
Format: Article
Language:English
Subjects:
Applied physics
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
Crystal defects
Dislocation density
DISLOCATIONS
Gallium arsenide
GALLIUM ARSENIDES
INDIUM
INDIUM ARSENIDES
Indium gallium arsenides
MATERIALS SCIENCE
Metalorganic chemical vapor deposition
Multi Quantum Wells
ORGANOMETALLIC COMPOUNDS
PHOTOLUMINESCENCE
QUANTUM WELLS
Ridges
SILICON
Silicon dioxide
SILICON OXIDES
Silicon substrates
SUBSTRATES
TEMPERATURE RANGE 0273-0400 K
Threading dislocations
TRAPPING
Trenches
VAPOR PHASE EPITAXY
VAPORS
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Summary:We report on an integration approach of III/V nano ridges on patterned silicon (Si) wafers by metal organic vapor phase epitaxy (MOVPE). Trenches of different widths (≤500 nm) were processed in a silicon oxide (SiO2) layer on top of a 300 mm (001) Si substrate. The MOVPE growth conditions were chosen in a way to guarantee an efficient defect trapping within narrow trenches and to form a box shaped ridge with increased III/V volume when growing out of the trench. Compressively strained InGaAs/GaAs multi-quantum wells with 19% indium were deposited on top of the fully relaxed GaAs ridges as an active material for optical applications. Transmission electron microcopy investigation shows that very flat quantum well (QW) interfaces were realized. A clear defect trapping inside the trenches is observed whereas the ridge material is free of threading dislocations with only a very low density of planar defects. Pronounced QW photoluminescence (PL) is detected from different ridge sizes at room temperature. The potential of these III/V nano ridges for laser integration on Si substrates is emphasized by the achieved ridge volume which could enable wave guidance and by the high crystal quality in line with the distinct PL.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4961936