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Evolution of nanodot morphology on polycarbonate (PC) surfaces by 40 keV Ar

In the present paper we have discussed the effect of 40 keV Ar+ ions irradiation on nanoscale surface morphology of Polycarbonate (PC) substrate. Specimens were sputtered at off normal incidences of 30°, 40° and 50° with the fluence of 1 × 1016 Ar+cm−2. The topographical behaviour of specimens was s...

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Bibliographic Details
Main Authors: Goyal, Meetika, Chawla, Mahak, Gupta, Divya, Shekhawat, Nidhi, Sharma, Annu, Aggarwal, Sanjeev
Format: Conference Proceeding
Language:English
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Summary:In the present paper we have discussed the effect of 40 keV Ar+ ions irradiation on nanoscale surface morphology of Polycarbonate (PC) substrate. Specimens were sputtered at off normal incidences of 30°, 40° and 50° with the fluence of 1 × 1016 Ar+cm−2. The topographical behaviour of specimens was studied by using Atomic Force Microscopy (AFM) technique. AFM study demonstrates the evolution of nano dot morphology on PC specimens on irradiating with 1 × 1016 Ar+cm−2. Average size of dots varied from 37-95 nm in this specified range of incidence while density of dots varied from 0.17-3.0 × 107 dotscm−2. Such variations in morphological features have been supported by estimation of ion range and sputtering yield through SRIM simulations.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.4946282