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Study of the Structural and Morphological Properties of HPHT Diamond Substrates

The morphological and structural properties of a series of high-pressure high-temperature (HPHT) single-crystal diamond substrates are comprehensively studied by white-light optical interference microscopy, atomic-force microscopy, and X-ray diffraction analysis. Procedures that provide a means for...

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Bibliographic Details
Published in:Semiconductors (Woodbury, N.Y.) N.Y.), 2018-11, Vol.52 (11), p.1432-1436
Main Authors: Yunin, P. A., Volkov, P. V., Drozdov, Yu. N., Koliadin, A. V., Korolev, S. A., Radischev, D. B., Surovegina, E. A., Shashkin, V. I.
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Language:English
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Summary:The morphological and structural properties of a series of high-pressure high-temperature (HPHT) single-crystal diamond substrates are comprehensively studied by white-light optical interference microscopy, atomic-force microscopy, and X-ray diffraction analysis. Procedures that provide a means for characterizing the substrate parameters most critical for epitaxial application with the laboratory equipment are described. It is shown that the jewelry-type characterization of diamond substrates is insufficient to assess the possibility of their use for the epitaxial growth of chemical-vapor-deposited (CVD) diamond.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782618110271