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Electron Energy-Loss Spectroscopy Study of the Change in the Free-Electron Density in Thin Superconducting NbN Films under Ion-Beam Irradiation
The change in the free-electron density in ultrathin (5 nm) superconducting NbN films in the initial state and after irradiation by O + ions to doses of (0.1–0.9) × 10 17 cm –2 has been studied by electron energy-loss spectroscopy (EELS). The analysis has been performed on cross section samples prep...
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Published in: | Crystallography reports 2018-03, Vol.63 (2), p.241-244 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | The change in the free-electron density in ultrathin (5 nm) superconducting NbN films in the initial state and after irradiation by O
+
ions to doses of (0.1–0.9) × 10
17
cm
–2
has been studied by electron energy-loss spectroscopy (EELS). The analysis has been performed on cross section samples prepared by the focused ion beam method, using plasmon oscillations with energies up to 50 eV. The radiation-induced replacement of nitrogen atoms with oxygen atoms in niobium nitride is found to change the electrical properties of the material, which leads to a decrease in the free-electron density with an increase in the irradiation dose. |
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ISSN: | 1063-7745 1562-689X |
DOI: | 10.1134/S1063774518020219 |