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Electron Energy-Loss Spectroscopy Study of the Change in the Free-Electron Density in Thin Superconducting NbN Films under Ion-Beam Irradiation

The change in the free-electron density in ultrathin (5 nm) superconducting NbN films in the initial state and after irradiation by O + ions to doses of (0.1–0.9) × 10 17 cm –2 has been studied by electron energy-loss spectroscopy (EELS). The analysis has been performed on cross section samples prep...

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Bibliographic Details
Published in:Crystallography reports 2018-03, Vol.63 (2), p.241-244
Main Authors: Prikhodko, K. E., Dementyeva, M. M., Gurovich, B. A., Komarov, D. A., Kutuzov, L. V.
Format: Article
Language:English
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Summary:The change in the free-electron density in ultrathin (5 nm) superconducting NbN films in the initial state and after irradiation by O + ions to doses of (0.1–0.9) × 10 17 cm –2 has been studied by electron energy-loss spectroscopy (EELS). The analysis has been performed on cross section samples prepared by the focused ion beam method, using plasmon oscillations with energies up to 50 eV. The radiation-induced replacement of nitrogen atoms with oxygen atoms in niobium nitride is found to change the electrical properties of the material, which leads to a decrease in the free-electron density with an increase in the irradiation dose.
ISSN:1063-7745
1562-689X
DOI:10.1134/S1063774518020219