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Electrical Conductivity and Barrier Properties of Lithium Niobate Thin Films
The thin-film structures made of LiNbO 3 and obtained via laser ablation and magnetron sputtering are studied with volt-farad and volt-ampere characteristics. A potential barrier on the Si–LiNbO 3 interface was found for both types of the films with the capacitance-voltage characteristics. The curre...
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Published in: | Physics of the solid state 2018-04, Vol.60 (4), p.743-746 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | The thin-film structures made of LiNbO
3
and obtained via laser ablation and magnetron sputtering are studied with volt-farad and volt-ampere characteristics. A potential barrier on the Si–LiNbO
3
interface was found for both types of the films with the capacitance-voltage characteristics. The current-voltage characteristics showed that there are several conduction mechanisms in the structures studied. The Poole–Frenkel effect and the currents limited by a space charge mainly contribute to the electrical conductivity in the LiNbO
3
film produced with the laser ablation method. The currents limited by a space charge contribute to the main mechanism in the film heterostructure obtained with the magnetron sputtering method. |
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ISSN: | 1063-7834 1090-6460 |
DOI: | 10.1134/S106378341804011X |