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Electrical Conductivity and Barrier Properties of Lithium Niobate Thin Films

The thin-film structures made of LiNbO 3 and obtained via laser ablation and magnetron sputtering are studied with volt-farad and volt-ampere characteristics. A potential barrier on the Si–LiNbO 3 interface was found for both types of the films with the capacitance-voltage characteristics. The curre...

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Bibliographic Details
Published in:Physics of the solid state 2018-04, Vol.60 (4), p.743-746
Main Authors: Gudkov, S. I., Baklanova, K. D., Kamenshchikov, M. V., Solnyshkin, A. V., Belov, A. N.
Format: Article
Language:English
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Summary:The thin-film structures made of LiNbO 3 and obtained via laser ablation and magnetron sputtering are studied with volt-farad and volt-ampere characteristics. A potential barrier on the Si–LiNbO 3 interface was found for both types of the films with the capacitance-voltage characteristics. The current-voltage characteristics showed that there are several conduction mechanisms in the structures studied. The Poole–Frenkel effect and the currents limited by a space charge mainly contribute to the electrical conductivity in the LiNbO 3 film produced with the laser ablation method. The currents limited by a space charge contribute to the main mechanism in the film heterostructure obtained with the magnetron sputtering method.
ISSN:1063-7834
1090-6460
DOI:10.1134/S106378341804011X