Effect of Material of Metal Sublayer and Deposition Configuration on the Texture Formation in the Piezoactive ZnO Films

Effect of material of metal sublayer (aluminum, vanadium, chromium, iron, cobalt, nickel, and copper) and deposition configuration on the formation of the oblique and straight texture in the ZnO films is studied. The films that are synthesized in a dc magnetron sputtering system. It is shown that th...

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Bibliographic Details
Published in:Technical physics 2018-01, Vol.63 (1), p.95-103
Main Authors: Veselov, A. G., Elmanov, V. I., Kiryasova, O. A., Nikulin, Yu. V.
Format: Article
Language:English
Subjects:
Acoustics
Acoustoelectronics
ALUMINIUM
Aluminum
Chemical etching
CHROMIUM
Chromium (Metal)
Classical and Continuum Physics
COBALT
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Configurations
COPPER
DEPOSITION
EROSION
IRON
Longitudinal waves
Magnetron sputtering
MAGNETRONS
Movies
NICKEL
OXIDATION
Physics
Physics and Astronomy
S waves
SUBSTRATES
Texture
THICKNESS
VANADIUM
Zinc oxide
ZINC OXIDES
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Summary:Effect of material of metal sublayer (aluminum, vanadium, chromium, iron, cobalt, nickel, and copper) and deposition configuration on the formation of the oblique and straight texture in the ZnO films is studied. The films that are synthesized in a dc magnetron sputtering system. It is shown that the piezoactive ZnO films with oblique texture that can generate shear waves are formed on the Cr and V metal sublayers in the shifted deposition configuration when the substrate is shifted relative to the magnetron axis toward the region of the target erosion. The piezoactive ZnO films with the straight structure that can generate longitudinal waves are formed on a chemically pure Al sublayer in the symmetric deposition configuration when the substrate is centered with respect to the target. Changes of the sublayer material in both deposition configurations or preliminary oxidation of the sublayer lead to the formation of the piezoactive ZnO films with mixed texture that excite shear and longitudinal waves. Chemical etching is used to show that the ZnO films with the oblique and straight textures exhibit piezoactive properties and can generate hypersound at thicknesses of no less than about 0.3 and about 0.9 μm, respectively.
ISSN:1063-7842
1090-6525
DOI:10.1134/S1063784218010279