Correlation between the structure, specific resistance, and optical properties of ITO films grown by CVD

By means of chemical vapor deposition (CVD) in a quasi-closed space with the use of a separate vaporizer, indium and tin oxides (ITOs)/glass structures with high conductivity and transparency and a thickness of up to 3 μm are obtained; they are suitable for the manufacture of protective coatings of...

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Bibliographic Details
Published in:Applied solar energy 2017-10, Vol.53 (4), p.322-325
Main Authors: Atabaev, I. G., Khazhiev, M. U., Zakirova, S. B., Shermatov, Z.
Format: Article
Language:English
Subjects:
CHEMICAL VAPOR DEPOSITION
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
CORRELATIONS
Electrical Machines and Networks
Engineering
GLASS
LAYERS
MIRRORS
OPACITY
Optical properties
Oxides
Power Electronics
PROTECTIVE COATINGS
Solar energy
Solar Engineering Materials Science
THICKNESS
Tin
TIN OXIDES
Vaporizers
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Summary:By means of chemical vapor deposition (CVD) in a quasi-closed space with the use of a separate vaporizer, indium and tin oxides (ITOs)/glass structures with high conductivity and transparency and a thickness of up to 3 μm are obtained; they are suitable for the manufacture of protective coatings of mirrors with a reflecting facial layer.
ISSN:0003-701X
1934-9424
1934-9424
DOI:10.3103/S0003701X1704003X