Three-Component Model of an Effective Medium for Determining the Composition of Layers on Silicon Wafers

A proposed model of an effective medium in which a Maxwell–Garnett matrix medium is filled with a Bruggeman medium is used to solve inverse problems of multi-angle ellipsometry to determine the composition of transition layers surrounding a layer of thermal silicon dioxide on a silicon substrate. Th...

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Bibliographic Details
Published in:Journal of applied spectroscopy 2017-11, Vol.84 (5), p.764-769
Main Authors: Staskov, N. I., Sotskaya, L. I.
Format: Article
Language:English
Subjects:
Analytical Chemistry
Atomic/Molecular Structure and Spectra
Composition effects
Dielectric materials
ELLIPSOMETRY
INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY
Inverse problems
LAYERS
MATRICES
OXIDATION
Physics
Physics and Astronomy
Semiconductor wafers
SILICON
Silicon dioxide
SILICON OXIDES
Silicon substrates
Silicon wafers
SUBSTRATES
Transition layers
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Description
Summary:A proposed model of an effective medium in which a Maxwell–Garnett matrix medium is filled with a Bruggeman medium is used to solve inverse problems of multi-angle ellipsometry to determine the composition of transition layers surrounding a layer of thermal silicon dioxide on a silicon substrate. The volume filling factors of the layer reflect correctly possible structural transformations during the oxidation of crystalline silicon.
ISSN:0021-9037
1573-8647
DOI:10.1007/s10812-017-0542-z