Investigation of a Contamination Film Formed by the Electron Beam Irradiation

In the study of materials on electron probe devices in the field of action of the electron beam, a contaminating hydrocarbon film is formed, which affects the experimental results. In this paper, we have studied the influence of a contamination film on carbon-film-coated dielectrics on the intensity...

Full description

Saved in:
Bibliographic Details
Published in:Technical physics 2019-09, Vol.64 (9), p.1336-1342
Main Authors: Orekhova, K. N., Serov, Yu. M., Dement’ev, P. A., Ivanova, E. V., Kravets, V. A., Usacheva, V. P., Zamoryanskaya, M. V.
Format: Article
Language:English
Subjects:
ABSORPTION
Absorptivity
CARBON
CATHODOLUMINESCENCE
Classical and Continuum Physics
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
CONTAMINATION
DIELECTRIC MATERIALS
ELECTRON BEAMS
Electron irradiation
ELECTRON PROBES
Electrons
HYDROCARBONS
Physics
Physics and Astronomy
Physics of Nanostructures
SURFACE COATING
THIN FILMS
ULTRAVIOLET RADIATION
X RADIATION
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In the study of materials on electron probe devices in the field of action of the electron beam, a contaminating hydrocarbon film is formed, which affects the experimental results. In this paper, we have studied the influence of a contamination film on carbon-film-coated dielectrics on the intensity of cathodoluminescence and characteristic X-ray lines. The absorption coefficient of the contamination film in the visible and UV ranges has been determined. Filming mechanisms at different parameters of the electron beam have been discussed.
ISSN:1063-7842
1090-6525
DOI:10.1134/S1063784219090123