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Properties of the Barium–Strontium Titanate Films Deposited onto the Silicon Substrate by rf Cathode Sputtering
Using rf cathode sputtering of a target in the oxygen atmosphere, Ba 0.6 Sr 0.4 TiO 3 solid solution thin films have been formed on the single-crystal Si(001) cut surface and their crystal structure, microstructure, and optical characteristics have been investigated. It is shown that the films are o...
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| Published in: | Technical physics letters 2018-12, Vol.44 (12), p.1157-1159 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
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| cites | cdi_FETCH-LOGICAL-c296t-b9923243253551c3379938f289b1a87a344237d8d6432f1570c3a0568c2e363b3 |
| container_end_page | 1159 |
| container_issue | 12 |
| container_start_page | 1157 |
| container_title | Technical physics letters |
| container_volume | 44 |
| creator | Shirokov, V. B. Zinchenko, S. P. Kiseleva, L. I. Pavlenko, A. V. |
| description | Using rf cathode sputtering of a target in the oxygen atmosphere, Ba
0.6
Sr
0.4
TiO
3
solid solution thin films have been formed on the single-crystal Si(001) cut surface and their crystal structure, microstructure, and optical characteristics have been investigated. It is shown that the films are optically anisotropic, polycrystalline, and have a
c
axis preferred direction perpendicular to the substrate. The
a
and
b
axes in the substrate plane have no preferred direction. It has been established that, during the synthesis, a buffer layer with a thickness of about 20 nm forms between the film and substrate, which is optically equivalent to silicon oxide. |
| doi_str_mv | 10.1134/S1063785018120568 |
| format | article |
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0.6
Sr
0.4
TiO
3
solid solution thin films have been formed on the single-crystal Si(001) cut surface and their crystal structure, microstructure, and optical characteristics have been investigated. It is shown that the films are optically anisotropic, polycrystalline, and have a
c
axis preferred direction perpendicular to the substrate. The
a
and
b
axes in the substrate plane have no preferred direction. It has been established that, during the synthesis, a buffer layer with a thickness of about 20 nm forms between the film and substrate, which is optically equivalent to silicon oxide.</description><identifier>ISSN: 1063-7850</identifier><identifier>EISSN: 1090-6533</identifier><identifier>DOI: 10.1134/S1063785018120568</identifier><language>eng</language><publisher>Moscow: Pleiades Publishing</publisher><subject>ANISOTROPY ; BARIUM COMPOUNDS ; Barium strontium titanates ; Buffer layers ; CATHODE SPUTTERING ; Classical and Continuum Physics ; CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY ; CONTROLLED ATMOSPHERES ; CRYSTAL STRUCTURE ; Crystals ; DEPOSITION ; MICROSTRUCTURE ; MONOCRYSTALS ; OPTICAL PROPERTIES ; OXYGEN ; Physics ; Physics and Astronomy ; POLYCRYSTALS ; SILICON ; SILICON OXIDES ; Silicon substrates ; Single crystals ; SOLID SOLUTIONS ; STRONTIUM TITANATES ; SYNTHESIS ; Thickness ; THIN FILMS</subject><ispartof>Technical physics letters, 2018-12, Vol.44 (12), p.1157-1159</ispartof><rights>Pleiades Publishing, Ltd. 2018</rights><rights>Copyright Springer Nature B.V. 2018</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c296t-b9923243253551c3379938f289b1a87a344237d8d6432f1570c3a0568c2e363b3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>230,314,780,784,885,27924,27925</link.rule.ids><backlink>$$Uhttps://www.osti.gov/biblio/22927844$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Shirokov, V. B.</creatorcontrib><creatorcontrib>Zinchenko, S. P.</creatorcontrib><creatorcontrib>Kiseleva, L. I.</creatorcontrib><creatorcontrib>Pavlenko, A. V.</creatorcontrib><title>Properties of the Barium–Strontium Titanate Films Deposited onto the Silicon Substrate by rf Cathode Sputtering</title><title>Technical physics letters</title><addtitle>Tech. Phys. Lett</addtitle><description>Using rf cathode sputtering of a target in the oxygen atmosphere, Ba
0.6
Sr
0.4
TiO
3
solid solution thin films have been formed on the single-crystal Si(001) cut surface and their crystal structure, microstructure, and optical characteristics have been investigated. It is shown that the films are optically anisotropic, polycrystalline, and have a
c
axis preferred direction perpendicular to the substrate. The
a
and
b
axes in the substrate plane have no preferred direction. It has been established that, during the synthesis, a buffer layer with a thickness of about 20 nm forms between the film and substrate, which is optically equivalent to silicon oxide.</description><subject>ANISOTROPY</subject><subject>BARIUM COMPOUNDS</subject><subject>Barium strontium titanates</subject><subject>Buffer layers</subject><subject>CATHODE SPUTTERING</subject><subject>Classical and Continuum Physics</subject><subject>CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY</subject><subject>CONTROLLED ATMOSPHERES</subject><subject>CRYSTAL STRUCTURE</subject><subject>Crystals</subject><subject>DEPOSITION</subject><subject>MICROSTRUCTURE</subject><subject>MONOCRYSTALS</subject><subject>OPTICAL PROPERTIES</subject><subject>OXYGEN</subject><subject>Physics</subject><subject>Physics and Astronomy</subject><subject>POLYCRYSTALS</subject><subject>SILICON</subject><subject>SILICON OXIDES</subject><subject>Silicon substrates</subject><subject>Single crystals</subject><subject>SOLID SOLUTIONS</subject><subject>STRONTIUM TITANATES</subject><subject>SYNTHESIS</subject><subject>Thickness</subject><subject>THIN FILMS</subject><issn>1063-7850</issn><issn>1090-6533</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2018</creationdate><recordtype>article</recordtype><recordid>eNp1kEFOwzAQRSMEEqVwAHaWWAdsTxzbSygUkCqB1LKOHNehrto4tZ0FO-7ADTkJDkVigVjNSP_90f-TZecEXxICxdWc4BK4YJgIQjErxUE2IljivGQAh8NeQj7ox9lJCGuMsaBMjrLds3ed8dGagFyD4sqgG-Vtv_18_5hH79qYdrSwUbUqGjS1m21At6ZzwUazREl336a53VjtWjTv6xD9gNZvyDdoouLKLZPe9TEab9vX0-yoUZtgzn7mOHuZ3i0mD_ns6f5xcj3LNZVlzGspKdACKAPGiAbgUoJoqJA1UYIrKAoKfCmWZWIawjjWoIbimhoooYZxdrG_60K0VdApr16liK3RsaJUUi6K4pfqvNv1JsRq7XrfpmAVJYJLzjDjiSJ7SnsXgjdN1Xm7Vf6tIrga_l_9-X_y0L0ndENt438v_2_6Ankahow</recordid><startdate>20181201</startdate><enddate>20181201</enddate><creator>Shirokov, V. B.</creator><creator>Zinchenko, S. P.</creator><creator>Kiseleva, L. I.</creator><creator>Pavlenko, A. V.</creator><general>Pleiades Publishing</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope></search><sort><creationdate>20181201</creationdate><title>Properties of the Barium–Strontium Titanate Films Deposited onto the Silicon Substrate by rf Cathode Sputtering</title><author>Shirokov, V. B. ; Zinchenko, S. P. ; Kiseleva, L. I. ; Pavlenko, A. V.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c296t-b9923243253551c3379938f289b1a87a344237d8d6432f1570c3a0568c2e363b3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2018</creationdate><topic>ANISOTROPY</topic><topic>BARIUM COMPOUNDS</topic><topic>Barium strontium titanates</topic><topic>Buffer layers</topic><topic>CATHODE SPUTTERING</topic><topic>Classical and Continuum Physics</topic><topic>CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY</topic><topic>CONTROLLED ATMOSPHERES</topic><topic>CRYSTAL STRUCTURE</topic><topic>Crystals</topic><topic>DEPOSITION</topic><topic>MICROSTRUCTURE</topic><topic>MONOCRYSTALS</topic><topic>OPTICAL PROPERTIES</topic><topic>OXYGEN</topic><topic>Physics</topic><topic>Physics and Astronomy</topic><topic>POLYCRYSTALS</topic><topic>SILICON</topic><topic>SILICON OXIDES</topic><topic>Silicon substrates</topic><topic>Single crystals</topic><topic>SOLID SOLUTIONS</topic><topic>STRONTIUM TITANATES</topic><topic>SYNTHESIS</topic><topic>Thickness</topic><topic>THIN FILMS</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Shirokov, V. B.</creatorcontrib><creatorcontrib>Zinchenko, S. P.</creatorcontrib><creatorcontrib>Kiseleva, L. I.</creatorcontrib><creatorcontrib>Pavlenko, A. V.</creatorcontrib><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>Technical physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Shirokov, V. B.</au><au>Zinchenko, S. P.</au><au>Kiseleva, L. I.</au><au>Pavlenko, A. V.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Properties of the Barium–Strontium Titanate Films Deposited onto the Silicon Substrate by rf Cathode Sputtering</atitle><jtitle>Technical physics letters</jtitle><stitle>Tech. Phys. Lett</stitle><date>2018-12-01</date><risdate>2018</risdate><volume>44</volume><issue>12</issue><spage>1157</spage><epage>1159</epage><pages>1157-1159</pages><issn>1063-7850</issn><eissn>1090-6533</eissn><abstract>Using rf cathode sputtering of a target in the oxygen atmosphere, Ba
0.6
Sr
0.4
TiO
3
solid solution thin films have been formed on the single-crystal Si(001) cut surface and their crystal structure, microstructure, and optical characteristics have been investigated. It is shown that the films are optically anisotropic, polycrystalline, and have a
c
axis preferred direction perpendicular to the substrate. The
a
and
b
axes in the substrate plane have no preferred direction. It has been established that, during the synthesis, a buffer layer with a thickness of about 20 nm forms between the film and substrate, which is optically equivalent to silicon oxide.</abstract><cop>Moscow</cop><pub>Pleiades Publishing</pub><doi>10.1134/S1063785018120568</doi><tpages>3</tpages></addata></record> |
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| ispartof | Technical physics letters, 2018-12, Vol.44 (12), p.1157-1159 |
| issn | 1063-7850 1090-6533 |
| language | eng |
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| subjects | ANISOTROPY BARIUM COMPOUNDS Barium strontium titanates Buffer layers CATHODE SPUTTERING Classical and Continuum Physics CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY CONTROLLED ATMOSPHERES CRYSTAL STRUCTURE Crystals DEPOSITION MICROSTRUCTURE MONOCRYSTALS OPTICAL PROPERTIES OXYGEN Physics Physics and Astronomy POLYCRYSTALS SILICON SILICON OXIDES Silicon substrates Single crystals SOLID SOLUTIONS STRONTIUM TITANATES SYNTHESIS Thickness THIN FILMS |
| title | Properties of the Barium–Strontium Titanate Films Deposited onto the Silicon Substrate by rf Cathode Sputtering |
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