Studying Near-Surface Layers of Germanium Implanted with Cobalt Ions

Results of an investigation of the surface of germanium nanostructured by means of ion implantation are presented. Single-crystalline germanium (c-Ge) plates were irradiated by 40-keV cobalt Co + ions in a dose range of (2–8) × 10 16 ion/cm 2 . Evolution of the germanium surface morphology with incr...

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Bibliographic Details
Published in:Technical physics letters 2019-10, Vol.45 (10), p.1047-1049
Main Authors: Bazarov, V. V., Shustov, V. A., Lyadov, N. M., Faizrakhmanov, I. A., Yanilkin, I. V., Khantimerov, S. M., Garipov, R. R., Fatykhov, R. R., Suleimanov, N. M., Valeev, V. F.
Format: Article
Language:English
Subjects:
Classical and Continuum Physics
COBALT COMPOUNDS
COBALT IONS
Cobalt plating
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Diffraction patterns
DOSES
GERMANIDES
GERMANIUM
ION IMPLANTATION
KEV RANGE
LAYERS
LITHIUM ION BATTERIES
MONOCRYSTALS
MORPHOLOGY
NANOSTRUCTURES
Physics
Physics and Astronomy
PLATES
RADIATION EFFECTS
SCANNING ELECTRON MICROSCOPY
Single crystals
SPHERICAL CONFIGURATION
Surface layers
SURFACES
X-RAY DIFFRACTION
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Summary:Results of an investigation of the surface of germanium nanostructured by means of ion implantation are presented. Single-crystalline germanium (c-Ge) plates were irradiated by 40-keV cobalt Co + ions in a dose range of (2–8) × 10 16 ion/cm 2 . Evolution of the germanium surface morphology with increasing ion dose was studied by method of scanning electron microscopy. It is established that an increase in the ion implantation dose is accompanied by gradual formation of a surface layer consisting of spherical particles with diameters of ~150 nm. Analysis of the X-ray diffraction patterns of samples was indicative of the appearance of nanosized cobalt germanide (CoGe) particles in the ion-implanted surface layer.
ISSN:1063-7850
1090-6533
DOI:10.1134/S1063785019100183