Determination of the Free Charge Carrier Concentration in Boron-Doped Silicon Nanowires Using Attenuated Total Reflection Infrared Spectroscopy

Attenuated total reflection infrared spectroscopy is used to determine the free charge carrier concentration in arrays of silicon nanowires with characteristic transverse sizes of 50–100 nm and a length of the order of 10 μm formed on lightly doped crystalline p -type silicon by metal-assisted chemi...

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Bibliographic Details
Published in:Semiconductors (Woodbury, N.Y.) N.Y.), 2019-11, Vol.53 (11), p.1524-1528
Main Authors: Lipkova, E. A., Efimova, A. I., Gonchar, K. A., Presnov, D. E., Eliseev, A. A., Lapshin, A. N., Timoshenko, V. Yu
Format: Article
Language:English
Subjects:
ABSORPTION SPECTROSCOPY
ANNEALING
Arrays
BORON
Carrier density
CHARGE CARRIERS
Chemical etching
Composite Semiconductors
CONCENTRATION RATIO
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Current carriers
DOPED MATERIALS
ETCHING
HOLES
Infrared reflection
INFRARED SPECTRA
Infrared spectroscopy
Magnetic Materials
Magnetism
Microcrystalline
Nanocrystalline
NANOWIRES
Organic chemistry
P-TYPE CONDUCTORS
Photonics
Physics
Physics and Astronomy
Porous
Power converters
REFLECTION
SILICON
Spectrum analysis
THERMAL DIFFUSION
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Summary:Attenuated total reflection infrared spectroscopy is used to determine the free charge carrier concentration in arrays of silicon nanowires with characteristic transverse sizes of 50–100 nm and a length of the order of 10 μm formed on lightly doped crystalline p -type silicon by metal-assisted chemical etching and subjected to the additional thermal-diffusion doping of boron at temperatures of 850–1000°C. It is found that the free hole concentration in arrays varies from 5 × 10 18 to 3 × 10 19 cm –3 depending on the annealing temperature and is maximal at temperatures of 900–950°C. These results can be used to extend the range of potential application of silicon nanowires in photonics, sensorics, and thermoelectric power converters.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782619110113