Interface-independent sound speed and thermal conductivity of atomic-layer-deposition-grown amorphous AlN/Al2 O 3 multilayers with varying oxygen composition

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Bibliographic Details
Published in:Physical review materials 2023-02, Vol.7 (2)
Main Authors: Hoque, Md Shafkat Bin, Brummel, Ian A., Hoglund, Eric R., Dionne, C. Jaymes, Aryana, Kiumars, Tomko, John A., Gaskins, John T., Hirt, Daniel, Smith, Sean W., Beechem, Thomas, Howe, James M., Giri, Ashutosh, Ihlefeld, Jon F., Hopkins, Patrick E.
Format: Article
Language:English
Subjects:
Materials Science
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ISSN:2475-9953