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Electronic and mechanical properties of Ge films grown on glass substrates
As germanium is closed lattice matched to GaAs, it is a suitable substrate for epitaxial growth. In the quest for inexpensive substrates, thin-film Ge grown on glass is an attractive candidate if suitable grain growth can be achieved. Here the authors will describe Ge films that are deposited by an...
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Main Authors: | , , , |
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Format: | Book |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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Summary: | As germanium is closed lattice matched to GaAs, it is a suitable substrate for epitaxial growth. In the quest for inexpensive substrates, thin-film Ge grown on glass is an attractive candidate if suitable grain growth can be achieved. Here the authors will describe Ge films that are deposited by an e-beam evaporator on glass and are approximately 2000 {angstrom} thick. The films were annealed at 500 C and 600 C to improve the quality of the material. The growth was done in three steps with 1000 {angstrom} of Ge, 70 {angstrom} of Sb, and followed by another 1000 {angstrom} of Ge. Sb is an n-type dopant in Ge and is included to enhance grain growth. The best films contained the Sb layer and hole concentrations between 1.4 {times} 10{sup 15} to 1.6 {times} 10{sup 17} cm{sup {minus}3}. The largest hole mobility measured was 30.6 cm{sup 2}/Vs in the 1.4 {times} 10{sup 15} p-type sample. The electron lifetime was measured by ultra-high frequency photoconductive decay and the best lifetimes were in the 30- to 40-ns range. Scanning-electron microscope and transmission-electron microscope studies indicated a polycrystalline grain structure with grain size comparable to the film thickness. |
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ISSN: | 0160-8371 |