Surface evolution of polycrystalline Al films deposited on amorphous substrates at elevated temperatures

A combined experimental and theoretical study of the surface evolution of sputtered aluminum coatings deposited on amorphous glass substrates (roughness

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Bibliographic Details
Published in:Journal of applied physics 2001-06, Vol.89 (11), p.6085-6091
Main Author: Eisenmenger-Sittner, C.
Format: Article
Language:English
Subjects:
ALUMINIUM
ATOMIC FORCE MICROSCOPY
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
DEPOSITION
GRAIN GROWTH
PARTICLE BEAMS
ROUGHNESS
SUBSTRATES
THICKNESS
THIN FILMS
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Description
Summary:A combined experimental and theoretical study of the surface evolution of sputtered aluminum coatings deposited on amorphous glass substrates (roughness
ISSN:0021-8979
1089-7550
DOI:10.1063/1.1368864