Analysis of ultrapure reagents from a large sub-boiling still made of teflow PFA

Inductively coupled plasma mass spectrometry was applied to the analysis of distillates of ultrahigh purity from quartz sub-boiling stills, a sub-boiling still made of Teflon TFE, and a sub-boiling still made of Teflon PFA. Although these studies were originally intended to prove the purity of disti...

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Bibliographic Details
Published in:Analytical chemistry (Washington) 1989-04, Vol.61:8
Main Authors: Paulsen, P.J., Beary, E.S., Bushee, D.S., Moody, J.R.
Format: Article
Language:English
Subjects:
400102 - Chemical & Spectral Procedures
400105 - Separation Procedures
CHALCOGENIDES
CHEMICAL ANALYSIS
DATA
DISTILLATES
DISTILLATION
DISTILLATION EQUIPMENT
EXPERIMENTAL DATA
FLUORINATED ALIPHATIC HYDROCARBONS
HALOGENATED ALIPHATIC HYDROCARBONS
HYDROCHLORIC ACID
HYDROFLUORIC ACID
HYDROGEN COMPOUNDS
IMPURITIES
INFORMATION
INORGANIC ACIDS
INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY
MASS SPECTROSCOPY
MATERIALS
MINERALS
MULTI-ELEMENT ANALYSIS
NUMERICAL DATA
ORGANIC COMPOUNDS
ORGANIC FLUORINE COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PETROCHEMICALS
PETROLEUM PRODUCTS
PLASMA
PLASTICS
POLY
POLYETHYLENES
POLYTETRAFLUOROETHYLENE
PURIFICATION
QUARTZ
SEPARATION PROCESSES
SILICON COMPOUNDS
SILICON OXIDES
SPECTROSCOPY
SYNTHETIC MATERIALS
TEFLON
WATER
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Description
Summary:Inductively coupled plasma mass spectrometry was applied to the analysis of distillates of ultrahigh purity from quartz sub-boiling stills, a sub-boiling still made of Teflon TFE, and a sub-boiling still made of Teflon PFA. Although these studies were originally intended to prove the purity of distillates from the PFA still, comparison of distillates from the various stills has led to an interesting observation about the suitability of TFE for these reagents.
ISSN:0003-2700
1520-6882
DOI:10.1021/ac00183a009