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Single source metalorganic chemical vapor deposition of low microwave surface resistance YBa sub 2 Cu sub 3 O sub 7
YBa{sub 2}Cu{sub 3}O{sub 7} films 2000--7500 A thick were deposited onto (100) LaAlO{sub 3} substrates using a novel single source metalorganic chemical vapor deposition technique. We have so far observed critical currents as high as 4{times}10{sup 6} A/cm{sup 2} at 77 K, transition temperatures ({i...
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Published in: | Applied physics letters 1991-07, Vol.59:5 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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Summary: | YBa{sub 2}Cu{sub 3}O{sub 7} films 2000--7500 A thick were deposited onto (100) LaAlO{sub 3} substrates using a novel single source metalorganic chemical vapor deposition technique. We have so far observed critical currents as high as 4{times}10{sup 6} A/cm{sup 2} at 77 K, transition temperatures ({ital T}{sub {ital c}} at {ital R}=0) as high as 91 K, and the 10 GHz microwave surface resistance {ital R}{sub {ital s}} as low as 40 {mu}{Omega} at 4.2 K and 400 {mu}{Omega} at 77 K. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.105400 |