Negative and positive ions from radio frequency plasmas in boron trichloride

The negative and positive ion mass spectra from radio frequency glow discharges in boron trichloride and 90% argon-10% boron trichloride mixtures have been investigated by amplitude modulation of the discharge excitation. The negative ion spectrum from pure boron trichloride was found to extend beyo...

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Bibliographic Details
Published in:Applied physics letters 1991-07, Vol.59 (2), p.161-163
Main Authors: OVERZET, L. J, LUO, L
Format: Article
Language:English
Subjects:
640301 - Atomic, Molecular & Chemical Physics- Beams & their Reactions
ARGON
BORON CHLORIDES
BORON COMPOUNDS
CHLORIDES
CHLORINE COMPOUNDS
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
ELECTRIC DISCHARGES
ELEMENTS
Exact sciences and technology
FLUIDS
GASES
GLOW DISCHARGES
HALIDES
HALOGEN COMPOUNDS
HIGH-FREQUENCY DISCHARGES
ION SOURCES
ION SPECTROSCOPY
MASS SPECTRA
NONMETALS
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
PLASMA
RARE GASES
SPECTRA
SPECTROSCOPY
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Summary:The negative and positive ion mass spectra from radio frequency glow discharges in boron trichloride and 90% argon-10% boron trichloride mixtures have been investigated by amplitude modulation of the discharge excitation. The negative ion spectrum from pure boron trichloride was found to extend beyond 200 amu under most conditions even though positive ions above 120 amu were not detected under any conditions. Surprisingly, only trace signals of BCl−3 were found from the discharges, while the signals from Cl−, BCl−4, B2Cl−4, and B2Cl−5 were much larger. We were unable to detect either positive or negative ions above 120 amu from 10% boron trichloride discharges.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.106006