Optical and magneto-optical characterization of TbFeCo thin films in trilayer structures

A series of TbFeCo films ranging in thickness from 100 to 800 Å have been deposited in trilayer structures on silicon wafer substrates, with Si3N4 being employed as the dielectric material. These films have been characterized both optically and magneto-optically by variable angle of incidence spectr...

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Bibliographic Details
Published in:Journal of applied physics 1991-04, Vol.69 (8), p.4568-4570
Main Authors: MCGAHAN, W. A, PING HE, LIANG-YAO CHEN, BONAFEDE, S, WOOLLAM, J. A, SEQUEDA, F, MCDANIEL, T, DO, H
Format: Article
Language:English
Subjects:
360104 - Metals & Alloys- Physical Properties
ALLOYS
AMORPHOUS STATE
Applied sciences
COBALT ALLOYS
Condensed matter: electronic structure, electrical, magnetic, and optical properties
DIELECTRIC PROPERTIES
ELECTRICAL PROPERTIES
ELLIPSOMETRY
Exact sciences and technology
IRON ALLOYS
KERR EFFECT
MAGNETO-OPTICAL EFFECTS
MATERIALS SCIENCE
MEASURING METHODS
Metals. Metallurgy
NITRIDES
NITROGEN COMPOUNDS
OPTICAL PROPERTIES
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
PHYSICAL PROPERTIES
Physics
PNICTIDES
RARE EARTH ALLOYS
SILICON COMPOUNDS
SILICON NITRIDES
SPUTTERING
TERBIUM ALLOYS
THIN FILMS
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Description
Summary:A series of TbFeCo films ranging in thickness from 100 to 800 Å have been deposited in trilayer structures on silicon wafer substrates, with Si3N4 being employed as the dielectric material. These films have been characterized both optically and magneto-optically by variable angle of incidence spectroscopic ellipsometry, normal angle of incidence reflectometry, and normal angle of incidence Kerr spectroscopy. From these measurements, the optical constants n and k have been determined for the TbFeCo films, as well as the magneto-optical constants Q1 and Q2. Results are presented that demonstrate the lack of dependence of these constants on the thickness of the TbFeCo film, and which can be used for calculating the expected optical and magneto-optical response of any multilayer structure containing similar TbFeCo films.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.348312