Interferometric, holographic techniques for Y-Ba-Cu-O film patterning

• Published in: IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States) 1991-03, Vol.27 (2), p.2446-2448
• Main Authors: Blyablin, A.A., Feoktistov, V.A., Kovalev, A.S., Korneev, V.V., Okhrimenko, V.N., Popov, A.M., Seleznev, B.V., Snigirev, O.V.
• Format: Article
• Language: English
• Subjects: ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; BARIUM OXIDES; BEAM SPLITTING; CHALCOGENIDES; COPPER COMPOUNDS; COPPER OXIDES; ETCHING; FABRICATION; HEAT TREATMENTS; Heating; Holographic optical components; HOLOGRAPHY; INTERFEROMETRY; LASERS; Lattices; MASKING; MATERIALS SCIENCE; Optical films; Optical interferometry; OXIDES; OXYGEN COMPOUNDS; Power lasers; PULSE TECHNIQUES; SUPERCONDUCTING DEVICES; SUPERCONDUCTING FILMS; Superconducting thin films; SURFACE FINISHING; THIN FILMS; TRANSITION ELEMENT COMPOUNDS; Yttrium barium copper oxide; YTTRIUM COMPOUNDS 360201 > Ceramics, Cermets, & Refractories-- Preparation & Fabrication; YTTRIUM OXIDES
• ISSN: 0018-9464; 1941-0069
• DOI: 10.1109/20.133713

A laser single-pulse heating process was developed for the reversible patterning of YBCO thin films. The lattice, which consists of superconducting and nonsuperconducting lines, was fabricated in an area of 4*4 mm/sup 2/. The period of the lattice depended on the optical scheme and ranged between 1.5 and 40 mu m. A 1.06- mu m YAG laser, which provided 0.2-0.3 J /cm/sup 2/ power density at the film surface with a pulse duration of 10-15 ns and a coherence length close to 15 cm, was used for the patterning in the usual interferometric scheme with split beams. The result suggests that such a process, which utilizes holographic masks, can be a powerful technique for high-T/sub c/ thin-film device fabrication.