The technology of chromium oxide passivation on stainless steel surface

A complete chromium oxide (Cr[sub 2]O[sub 3]) passivation technology has been developed for stainless steel surfaces for use in high purity gas-delivery systems and process chambers. Starting with an electrochemical buffing (ECB) to add to electro-polished (EP) SUS316L stainless steel material, an o...

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1993-06, Vol.140 (6), p.1691-1699
Main Authors: OHMI, T, OHKI, A, NAKAMURA, M, KAWADA, K, WATANABE, T, NAKAGAWA, Y, MIYOSHI, S, TAKAHASHI, S, CHEN, M. S. K
Format: Article
Language:English
Subjects:
360105 - Metals & Alloys- Corrosion & Erosion
ALLOYS
Applied sciences
AUSTENITIC STEELS
CHALCOGENIDES
CHLORINE COMPOUNDS
CHROMIUM ALLOYS
CHROMIUM COMPOUNDS
CHROMIUM OXIDES
CHROMIUM-NICKEL STEELS
CHROMIUM-NICKEL-MOLYBDENUM STEELS
Corrosion
Corrosion mechanisms
CORROSION RESISTANCE
CORROSION RESISTANT ALLOYS
ELECTROLYSIS
ELECTROPOLISHING
Exact sciences and technology
HALOGEN COMPOUNDS
HEAT RES
HEAT TREATMENTS
HIGH ALLOY STEELS
HYDROCHLORIC ACID
HYDROGEN COMPOUNDS
INORGANIC ACIDS
IRON ALLOYS
IRON BASE ALLOYS
LYSIS
MATERIALS SCIENCE
Metals. Metallurgy
MOLYBDENUM ALLOYS
NICKEL ALLOYS
OXIDES
OXYGEN COMPOUNDS
PASSIVATION
POLISHING
STABILITY
STAINLESS STEEL-316L
STAINLESS STEELS
STEEL-CR17NI12MO3-L
STEELS
SURFACE FINISHING
TRANSITION ELEMENT COMPOUNDS
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Description
Summary:A complete chromium oxide (Cr[sub 2]O[sub 3]) passivation technology has been developed for stainless steel surfaces for use in high purity gas-delivery systems and process chambers. Starting with an electrochemical buffing (ECB) to add to electro-polished (EP) SUS316L stainless steel material, an optimal thermal treatment was found by using a gas mixture of 10% hydrogen, 1--10 ppm oxygen and argon balance gas at 500C for 1 h. Five-day corrosion tests with HCl gas (containing 1.4 ppm moisture) at 5 kg/cm[sup 2] and 100C showed no sign of corrosion on the chromium oxide passivated surface. Chemical stability tests on this surface with silane specialty gas thermal decomposition also showed a remarkable noncatalytic activity compared with conventional surfaces.
ISSN:0013-4651
1945-7111
DOI:10.1149/1.2221625