Phase relationships in Cu-O thin films prepared by sputtering

The conditions for deposition of Cu and Cu-oxide thin films by reactive dc sputtering have been investigated by characterizing the crystal structure of growing films both during and immediately following deposition using an in situ x-ray diffraction technique. The relationship between sputtering con...

Full description

Saved in:
Bibliographic Details
Published in:Applied physics letters 1991-12, Vol.59 (24), p.3174-3176
Main Authors: MILLER, D. J, CHIARELLO, R. P, KIM, H. K, ROBERTS, T, YOU, H, KAMPWIRTH, R. T, ZHENG, J. Q, WILLIAMS, S, CHANG, R. P. H, KETTERSON, J. B
Format: Article
Language:English
Subjects:
360201 - Ceramics, Cermets, & Refractories- Preparation & Fabrication
CHALCOGENIDES
CHEMICAL COMPOSITION
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
DIFFRACTION
IN-SITU PROCESSING
MATERIALS SCIENCE
OXIDES
OXYGEN COMPOUNDS
PARTIAL PRESSURE
PHASE STUDIES
PHASE TRANSFORMATIONS
PRESSURE DEPENDENCE
PROCESSING
SCATTERING
SPUTTERING
TEMPERATURE DEPENDENCE
TRANSITION ELEMENT COMPOUNDS
X-RAY DIFFRACTION
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The conditions for deposition of Cu and Cu-oxide thin films by reactive dc sputtering have been investigated by characterizing the crystal structure of growing films both during and immediately following deposition using an in situ x-ray diffraction technique. The relationship between sputtering conditions and the phases deposited was established for a variety of conditions. At each temperature studied, increasing the oxygen pressure in the system resulted in a systematic change in the phases deposited. Of significant importance was the identification of temperature-pressure regimes in which CuO was stable during deposition but reverted to Cu2O after the sputtering plasma was extinguished, suggesting a shift in the oxidizing potential in the plasma environment. These results also suggest that the in situ analysis technique may be ideally suited for the investigation of phase relationships and phase diagrams in other systems.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.105775