Metalorganic Chemical Vapor Deposition of Tl sub 2 Ba sub 2 CaCu sub 2 O sub x Superconducting Thin Films Using Fluorinated beta -Diketonate Source Reagents

Superconducting Tl sub 2 Ba sub 2 CaCu sub 2 O sub x films were fabricated using a three-step process. Amorphous BaCaCuOF films were deposted on MgO(100) single-crystal substrates by metalorganic chemical vapor deposition at 500 deg C using fluorinated beta -diketonate complexes of Ba, Ca, and Cu. T...

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Bibliographic Details
Published in:Applied physics letters 1990-11, Vol.57 (20), p.2136-2138
Main Authors: Hamaguchi, N, Gardiner, R, Kirlin, P S, Dye, R, Hubbard, K M, Muenchausen, R E
Format: Article
Language:English
Subjects:
360204 > Ceramics, Cermets, & Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BARIUM OXIDES
CALCIUM COMPOUNDS
CALCIUM OXIDES
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL CURRENT
CURRENTS
DEPOSITION
ELECTRIC CURRENTS
HEAT TREATMENTS
HIGH-TC SUPERCONDUCTORS
LASL
MATERIALS SCIENCE
NATIONAL ORGANIZATIONS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
SURFACE COATING
THALLIUM COMPOUNDS
THALLIUM OXIDES
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
US AEC
US DOE
US ERDA
US ORGANIZATIONS 360202 > Ceramics, Cermets, & Refractories-- Structure & Phase Studies
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Summary:Superconducting Tl sub 2 Ba sub 2 CaCu sub 2 O sub x films were fabricated using a three-step process. Amorphous BaCaCuOF films were deposted on MgO(100) single-crystal substrates by metalorganic chemical vapor deposition at 500 deg C using fluorinated beta -diketonate complexes of Ba, Ca, and Cu. The fluorine was stripped in wet oxygen at 785 deg C and c-axis oriented Tl sub 2 Ba sub 2 CaCu sub 2 O sub x films were then formed by annealing in dry O sub 2 at 870 deg C in the presence of Tl sub 2 O sub 3 /Ba sub 2 Ca sub 2 CuN sub 3 O sub x pellets. The best films showed onsets of superconductivity at 125K and zero resistivity was achieved by 108K. Critical current densities as high as 10 exp 4 A/cm exp 2 were obtained at 90K. Diffraction patterns, Graphs, Photomicrographs. 11 ref.--AA
ISSN:0003-6951
1077-3118
DOI:10.1063/1.104156