rf plasma aerosol deposition of superconductive Y sub 1 Ba sub 2 Cu sub 3 O sub 7 minus. delta. films at atmospheric pressure

• Published in: Applied physics letters 1990-10, Vol.57:15
• Main Authors: Wang, X.W., Zhong, H.H., Snyder, R.L.
• Format: Article
• Language: English
• Subjects: 360201 - Ceramics, Cermets, & Refractories- Preparation & Fabrication; AEROSOLS; ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; BARIUM OXIDES; CHALCOGENIDES; COLLOIDS; COPPER COMPOUNDS; COPPER OXIDES; DEPOSITION; DISPERSIONS; EVAPORATION; HIGH-TC SUPERCONDUCTORS; MATERIALS SCIENCE; OXIDES; OXYGEN COMPOUNDS; PHASE TRANSFORMATIONS; PHYSICAL PROPERTIES; SOLS; SUPERCONDUCTING FILMS; SUPERCONDUCTORS; THERMODYNAMIC PROPERTIES; TRANSITION ELEMENT COMPOUNDS; TRANSITION TEMPERATURE; VACUUM EVAPORATION; YTTRIUM COMPOUNDS; YTTRIUM OXIDES
• ISSN: 0003-6951; 1077-3118
• DOI: 10.1063/1.104130

Superconducting films of Y{sub 1}Ba{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} were produced by a radio frequency (rf) plasma aerosol evaporation technique at atmospheric pressure. Aqueous solutions of the ions were generated as an aerosol and the mist was injected into the plasma region, and then deposited onto substrates outside of both the plasma and flame regions. The substrate temperature was about 600 {degree}C. The deposition rate is 0.01--100 {mu}m/(min cm{sup 2}) and the film thickness is 1--200 {mu}m. For an as-deposited'' film on a single-crystalline MgO substrate (100), the onset temperature of the superconducting transition is 100 K, with a transition width (10--90%) of 3 K, and zero resistance at 91 K. For another film post annealed at 850{plus minus}10 {degree}C for 1 h, the onset temperature is 105 K, with a width of 6 K, and zero resistance at 91 K. Since this technique does not require a vacuum environment, it has potential for large scale production of thin films.