X-ray reflectivity and scanning-tunneling-microscope study of kinetic roughening of sputter-deposited gold films during growth

An [ital in] [ital situ] x-ray reflectivity study of the dynamic evolution of a growing interface was carried out for gold sputter-deposited onto a polished silicon substrate. X-ray reflectivity data were recorded during growth for thicknesses of the gold film ranging from 50 to 3500 A. A progressiv...

Full description

Saved in:
Bibliographic Details
Published in:Physical review letters 1993-05, Vol.70 (19), p.2900-2903
Main Authors: YOU, H, CHIARELLO, R. P, KIM, H. K, VANDERVOORT, K. G
Format: Article
Language:English
Subjects:
360601 - Other Materials- Preparation & Manufacture
360602 - Other Materials- Structure & Phase Studies
665100 - Nuclear Techniques in Condensed Matter Physics - (1992-)
Applied sciences
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Condensed matter: structure, mechanical and thermal properties
CRYSTAL GROWTH
DEPOSITION
ELECTRON MICROSCOPY
ELEMENTS
Exact sciences and technology
GOLD
IN-SITU PROCESSING
MATERIALS SCIENCE
Mechanical and acoustical properties
adhesion
METALS
Metals. Metallurgy
MICROSCOPY
OPTICAL PROPERTIES
PHYSICAL PROPERTIES
Physics
PROCESSING
REFLECTIVITY
ROUGHNESS
SCALING LAWS
Solid surfaces and solid-solid interfaces
Solid-fluid interfaces
SPECTRA
SPUTTERING
SURFACE PROPERTIES
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
TRANSITION ELEMENTS
X-RAY SPECTRA
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:An [ital in] [ital situ] x-ray reflectivity study of the dynamic evolution of a growing interface was carried out for gold sputter-deposited onto a polished silicon substrate. X-ray reflectivity data were recorded during growth for thicknesses of the gold film ranging from 50 to 3500 A. A progressive kinetic roughening of the gold-vacuum interface was observed and the time-dependent interfacial width exhibits a power-law behavior. Aided by scanning-tunneling-microscopy measurements the scaling exponents were determined and compared with theoretical studies.
ISSN:0031-9007
1079-7114
DOI:10.1103/physrevlett.70.2900